Industrial resistivity meter

This resistivity meter is ideal for such applications as the high-precision water monitoring employed at ultra-pure water plants used in semiconductor manufacturing.
They utilize newly designed, high-precision, high-stability temperature measurement circuitry and a vastly improved temperature compensation function, an important element for measuring the resistivity of ultra-pure water.

Segment: Process And Environment

Division: Process Water

Manufacturing Company: HORIBA Advanced Techno Co., Ltd.

Model	HE-960RW
Sensor input	2-channel
Cell constant	Approx. 0.01 /cm
Temperature compensation element	Pt 1000 Ω (0 °C)
Measuring range	Resistivity : 0 to 2.00 / 20.00 / 100.0 MΩ·cm (0 to 20.0 / 200.0 / 1000 kΩ·cm) *; Measurable without temperature conversion
Temperature : 0 to 100 °C Desalination rate : 0 to 100%
Repeatability	within ±0.1% of the full scale (in equivalent input)
Linearity	within ±0.1% of the full scale (in equivalent input)
Transmission output	2 output points, Max. load resistance: 900 Ω 4 to 20 / 0 to 20 mA DC : input / output isolated type Transmission output range : Freely selectable within the measurement range. However, repeatability and linearity will remain accurate to the separately set measuring range. (Negative terminals of each transmission output channel are connected inside and thus have the same electric potential.)
Contact output	4 output points; Alarm contact output (R1, R2, R3, R4) Contact type : relay contact R1, R2, R3 ; SPST R4 ; SPDT Contact rating: 240 V AC 3 A and 30 V DC 3 A (resistance load)
Communication output	RS-485
Calibration function	Specific resistance Temperature
Ultra-pure water Specific resistance selection	18.23 (standard), 18.18, 18.24 MΩ·cm 182.3 (standard), 181.8, 182.4 kΩ·cm
Temperature compensation	Temperature compensation for ultra-pure water and impurities Reference temperature: 5 °C to 95 °C
Temperature compensation range	0 to 100 °C
Ambient environment	Temperature: -5 °C to 45 °C, Relative humidity: 20% to 85% (without dew condensation)
Power supply	100 to 240 V AC ±10%, 50/60 Hz, 15 VA (max)
Protective Structure	Panel : IP65, Rear case : IP20, Terminal : IP00 (Indoor-use panel instrallation type)
Weight	Approx. 550 g
Compliance	CE marking FCC Part15

Model

HE-960RW

Sensor input

2-channel

Cell constant

Approx. 0.01 /cm

Temperature compensation element

Pt 1000 Ω (0 °C)

Measuring range

Resistivity : 0 to 2.00 / 20.00 / *100.0 MΩ·cm
(0 to 20.0 / 200.0 / *1000 kΩ·cm)
*; Measurable without temperature conversion

Temperature : 0 to 100 °C
Desalination rate : 0 to 100%

Repeatability

within ±0.1% of the full scale (in equivalent input)

Linearity

within ±0.1% of the full scale (in equivalent input)

Transmission output

2 output points, Max. load resistance: 900 Ω
4 to 20 / 0 to 20 mA DC : input / output isolated type

Transmission output range : Freely selectable within the measurement range. However, repeatability and linearity will remain accurate to the separately set measuring range.

(Negative terminals of each transmission output channel are connected inside and thus have the same electric potential.)

Contact output

4 output points; Alarm contact output (R1, R2, R3, R4)
Contact type : relay contact R1, R2, R3 ; SPST
R4 ; SPDT
Contact rating: 240 V AC 3 A and 30 V DC 3 A
(resistance load)

Communication output

RS-485

Calibration function

Specific resistance
Temperature

Ultra-pure water Specific
resistance
selection

18.23 (standard), 18.18, 18.24 MΩ·cm
182.3 (standard), 181.8, 182.4 kΩ·cm

Temperature compensation

Temperature compensation for ultra-pure water and impurities
Reference temperature: 5 °C to 95 °C

Temperature compensation range

0 to 100 °C

Ambient environment

Temperature: -5 °C to 45 °C, Relative humidity: 20% to 85% (without dew condensation)