HF-960EM

In-line Sensor & Auto Range Switching Concentration Monitor HF-960EM

In-line Sensor & Auto Range Switching Concentration Monitor

Measures a wide range of HF concentration from low concentration to undiluted liquid. The HF-960EM achieves high precision measurement by the auto-correction range switching function. Also has the capibility of cleanliness with all PFA sensors. Measurement range: 0 - 50%.

 

Segment: Semiconductor
Division: Wet Process Control
Base product
Manufacturing Company: HORIBA Advanced Techno Co. Ltd.

 

  • Wide range measurement, from low concentration to undiluted liquid. Measurement range: 0 - 50%.
  • High precision measurement by the auto-correction range switching function.
  • All PFA sensors, ideal for semiconductor processing
  • 24 V DC power supply
  • RoHS compliant

 

 

Specifications of HF-960EM
Model nameHF-960EM
Measurement rangeHF: 0 - 50%, HCl: 0 - 10%, Conductivity: 0 - 2000 mS/cm
Repeatability+/- 0.5% F.S. (in equivalent input)
Linearity+/- 0.5% F.S. (in equivalent input)
Transmission outputNumber of output: 4
Contact outputOutputs: 5 points
Contact inputInputs: 2 points
Communication outputRS-485
Power supplyDC 24 V +/- 10% 15W
Compatible sensorCM-520 Series
Wetted material of sensorPFA

Schematics

Semiconductor BEOL CMP in Semiconductor Manufacturing Process
Semiconductor BEOL CMP in Semiconductor Manufacturing Process

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