Semiconductor BEOL CMP in Semiconductor Manufacturing Process
HF-960EM
In-line Sensor & Auto Range Switching Concentration Monitor
Measures a wide range of HF concentration from low concentration to undiluted liquid. The HF-960EM achieves high precision measurement by the auto-correction range switching function. Also has the capibility of cleanliness with all PFA sensors. Measurement range: 0 - 50%.
Segment: Semiconductor
Division: Wet Process Control
Manufacturing Company: HORIBA Advanced Techno Co., Ltd.
- Wide range measurement, from low concentration to undiluted liquid. Measurement range: 0 - 50%.
- High precision measurement by the auto-correction range switching function.
- All PFA sensors, ideal for semiconductor processing
- 24 V DC power supply
- RoHS compliant
| Model name | HF-960EM |
|---|---|
| Measurement range | HF: 0 - 50%, HCl: 0 - 10%, Conductivity: 0 - 2000 mS/cm |
| Repeatability | +/- 0.5% F.S. (in equivalent input) |
| Linearity | +/- 0.5% F.S. (in equivalent input) |
| Transmission output | Number of output: 4 |
| Contact output | Outputs: 5 points |
| Contact input | Inputs: 2 points |
| Communication output | RS-485 |
| Power supply | DC 24 V +/- 10% 15W |
| Compatible sensor | CM-520 Series |
| Wetted material of sensor | PFA |
Schematics
![[Exclusively for TWIN] Conductivity Cell 0413](http://static.horiba.com/fileadmin/Horiba/_processed_/b/1/csm_HR1918_11e69b1635.png)
