- Measurement range : 0 - 10 %
- Automatic display range switching
- Enables four types of measurement: HF concentration, HCl concentration, conductivity, and temperature
- 24 V DC power supply
- RoHS compliant
Accurately measures concentrations of HF and HCl used in semiconductor manufacturing and other processes. The dedicated FES-510 series sensor is highly resistant to chemicals, making this unit ideal for the management of HF and HCl. Measurement range: 0 -10%.
|Measurement range||HF: 0 - 10%, HCl: 0 - 10%, Conductivity: 0 - 1000mS/cm|
|Power supply||24 V DC ±10%, 10 W (max.)|
|Protective structure||Panel: IP65, Rear case: IP20, Terminal: IP00 (indoor-use panel installation type)|
|Mass||Approx. 550 g|
|Conforming standards||CE marking, FCC Part 15|
|Compatible sensors||FES-510 Series (flow-type carbon sensor)|
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