HF/HNO3 Monitor, CS-153N

CS-100 Seriesr, CS-137-153-152-150-100-153N-139E

The CS-153N is a high-precision chemical solution concentration monitor designed to meet the strict demands of semiconductor wet-etching processes. Etching processes use HF/HNO3 solution to etch silicon oxide and remove particles from the wafer surface. The CS-153N continually monitors each component of the HF/HNO3 solution (HF/HNO3/H2O), alerting the user each time the solution is replaced or replenished. This allows you to maintain the concentration of the HF/HNO3 solution within the tolerance range, while eliminating unnecessary solution replacement.

 

Segment: Semiconductor
Division: Wet Process Control
Base product
Manufacturing Company: HORIBA Advanced Techno Co. Ltd.

 

  • Short 3-second measurement cycle supports concentration control for 300-mm processes
    A short measurement cycle of approximately three seconds makes it possible to track concentrations at much closer to real time. Supports fine-tuned concentration control for batch-type-bath as well as single-bath cleaning devices.
  • Compact design helps reduce cleaning-device footprint
    The compact design reduces the monitor's footprint by about a third*, reducing the amount of space required by the cleaning device. The monitor is easily integrated with the cleaning device.
    *Based on comparison with the HORIBA CS-327 series.
  • Reduces lot defects in the cleaning process for improved yield
    Output from the monitor is used for automated spiking control of the HF/HNO3 solutions, enabling cleaning with a high reproducibility rate. As a result, lot defects decrease in the cleaning process, which helps to boost the overall yield.
  • Fully automated measurement simplifies control
    All the user has to do is set up the HF/HNO3 solution supply. Measurement is fully automatic, so no control whatsoever is required once the measurement has begun. Also, air is used for reference spectral measurement, and water concentrations can also be measured, which allows continuous tracking of changes in water concentration due to evaporation of the solution and adherence to the wafer. This allows fine-tuned control of silicon-oxide etching.
  • Comprehensive measures to eliminate air bubbles enable continuous measurement
    A built-in bubble removal function removes air bubbles immediately before the flow cell, which allows continuous measurement of the solution as it is flowing.
  • 24 V DC used for improved safety
    The monitor uses a low-voltage (24 V DC), and running on about 45 W gives it even better electric-shock safety and energy efficiency. An internal leakage sensor is also installed to detect solution leaks, so that the supply of HF/HNO3 solutions can be shut off in the event of an emergency.

 

 

Model specifications

CS-153N: No cooling unit

CS-153NC: Integrated cooling unit

Measurement sample

HF/HNO3(HF/HNO3solution)

Measurement principle

Absorption spectrometry

Concentration computation principle

Temperature-compensated multivariate analysis

Measurement range

HNO3: 57.0 to 65.0%

HF: 3.00 to 8.00%

H2O: 27.0 to 40.0%

Please consult HORIBA for information concerning other measurement ranges.

Reproducibility (Peak to peak)

HNO3:  ± 0.3%

HF: ± 0.25%

H2O: ± 0.5%

Chemical conditions

CS-153N:

Temperature: 20 to 30°C

Flow rate: 20 to 60 mL/min.

Pressure: 0.10 to 0.20 MPa

CS-153NC:

Temperature: 20 to 80°C

Flow rate: 20 to 40 mL/min.

Pressure: 0.10 to 0.20 MPa

Measurement cycle

Approx. 2 seconds minimum

(not including chemical replacement and cooling times)

Equipment temperature

20 to 25

Operation panel

1) Temperature level display:  HNO3, HF: , water

2) Alarm display: HNO3, HF: Concentration low-low limit, concentration low limit, concentration high limit, concentration high-high limit

3) Alarm value settings:  HNO3, HF: Concentration low-low limit, concentration low limit, concentration high limit, concentration high-high limit

Serial input/output

RS-232C

1) Concentration data:  HNO3, HF

2) Alarm value settings:  HNO3, HF:  Concentration low-low limit, concentration low limit, concentration high limit, concentration high-high limit Parallel input 12 to 30 V DC (photocoupler insulated) Parallel concentration alarm (ON/OFF)

Parallel output

Maximum current when open collector output is ON: 5 mA

Maximum voltage when open collector output is OFF: 30 V

1) Alarm output:  HNO3, HF: Concentration low-low limit, concentration low limit, concentration high limit, concentration high-high limit

2) Device error

3) Liquid leakage

Analog output

4 to 20 mA (2 outputs:  HNO3 concentration, HF concentration) *Regardless of the range specifications, the output of 4 ~ 20 mA can be made to correspond to 0 ~ 10% concentrations.

(Please specify when ordering.)

Power supply

24 V DC ± 10%, 2 A

Dimensions

CS-153N: 205 (W) x 329 (D) x 269 (H) mm

CS-153NC: 291 (W) x 329 (D) x 269 (H) mm

Weight

CS-153N: Approx. 11 kg

CS-153NC: Approx. 12 kg

Connection pipe size

For input and exhaust: Outer diameter 3 mm (inner diameter 2 mm)

Pipe connection

Nippon Pillar Super type

REQUEST FOR INFORMATION

Do you have any questions or requests? Use this form to contact our specialists.

Related products

2-channel High Precision HF Concentration Monitor HF-SP-CU
More2-channel High Precision HF Concentration Monitor HF-SP-CU
2-Channel Resistivity Meter HE-960RW-GC(W)
More2-Channel Resistivity Meter HE-960RW-GC(W)
BHF Concentration Monitor, CS-137
MoreBHF Concentration Monitor, CS-137
Carbon Sensor Conductivity Meter (High concentration type) HE-960HC
MoreCarbon Sensor Conductivity Meter (High concentration type) HE-960HC
Carbon Sensor Conductivity Meter (Low concentration type) HE-480C-GC
MoreCarbon Sensor Conductivity Meter (Low concentration type) HE-480C-GC
Carbon Sensor Conductivity Meter HE-960LC
MoreCarbon Sensor Conductivity Meter HE-960LC
Carbon Sensor Resistivity Meter HE-960R-GC(W)
MoreCarbon Sensor Resistivity Meter HE-960R-GC(W)
Citric Acid Monitor HE-960CA
MoreCitric Acid Monitor HE-960CA
Dissolved Oxygen Monitor in Low Concentration HF HD-960L
MoreDissolved Oxygen Monitor in Low Concentration HF HD-960L
Dissolved Ozone Monitor HZ-960
MoreDissolved Ozone Monitor HZ-960
Fiber Optic Type Chemical Concentration Monitor CS-600F
MoreFiber Optic Type Chemical Concentration Monitor CS-600F
FPM Monitor CS-153
MoreFPM Monitor CS-153
H2O2 Monitor HZ-960HPO-M
MoreH2O2 Monitor HZ-960HPO-M
HF / HCl Concentration Monitor HF-960H
MoreHF / HCl Concentration Monitor HF-960H
HF-960M
MoreHF-960M
Low Concentration Type HF/HCl/NH3 Concentration Monitor
High Precision TMAH Concentration Monitor HE-960H-TM-S
MoreHigh Precision TMAH Concentration Monitor HE-960H-TM-S
High Precision, High Stability Chemical Concentration Monitor
MoreHigh Precision, High Stability Chemical Concentration Monitor
High Resistivity Meter HE-Z-100T
MoreHigh Resistivity Meter HE-Z-100T
High-speed response and compact chemical solution concentration monitor SC-1 Monitor, CS-131
MoreHigh-speed response and compact chemical solution concentration monitor SC-1 Monitor, CS-131
High-speed response and compact chemical solution concentration monitor TMAH/H2O2 Monitor, CS-139E
MoreHigh-speed response and compact chemical solution concentration monitor TMAH/H2O2 Monitor, CS-139E
Highly Sensitive Silica Monitor SLIA-300
MoreHighly Sensitive Silica Monitor SLIA-300
Ideal for hydrofluoric acid monitoring in semiconductor manufacturing Hydrofluoric Acid Monitor CM-200A/210A
MoreIdeal for hydrofluoric acid monitoring in semiconductor manufacturing Hydrofluoric Acid Monitor CM-200A/210A
In-line Sensor & Auto Range Switching Concentration Monitor HF-960EM
MoreIn-line Sensor & Auto Range Switching Concentration Monitor HF-960EM
Industrial conductivity meter (low concentration type) HE-480C
MoreIndustrial conductivity meter (low concentration type) HE-480C
Industrial electric conductivity meter HE-200C (Four-Wire Analyzer)
MoreIndustrial electric conductivity meter HE-200C (Four-Wire Analyzer)
Industrial electric conductivity meter HE-300C (Two-Wire Transmitter)
MoreIndustrial electric conductivity meter HE-300C (Two-Wire Transmitter)
Industrial electric resistivity meter HE-200R (Four-Wire Analyzer)
MoreIndustrial electric resistivity meter HE-200R (Four-Wire Analyzer)
Industrial electric resistivity meter HE-300R (Two-Wire Transmitter)
MoreIndustrial electric resistivity meter HE-300R (Two-Wire Transmitter)
Industrial pH meter HP-480(W)
MoreIndustrial pH meter HP-480(W)
Industrial resistivity meter HE-480R
MoreIndustrial resistivity meter HE-480R
Industrial resistivity meter HE-480R(W)
MoreIndustrial resistivity meter HE-480R(W)
Industrial resistivity meter HE-960RW
MoreIndustrial resistivity meter HE-960RW
KOH Monitor HE-960H-KOH
MoreKOH Monitor HE-960H-KOH
Micro Volume pH Monitor UP-100
MoreMicro Volume pH Monitor UP-100
SC-2 Concentration Monitor, CS-152
MoreSC-2 Concentration Monitor, CS-152
Semiconductor process monitoring for SC-2 process
SPM Monitor CS-150
MoreSPM Monitor CS-150
Stand-alone Type Chemical Concentration Monitor CS-100 Series
MoreStand-alone Type Chemical Concentration Monitor CS-100 Series
TMAH Conductivity Meter. Perfect for Controlling TMAH Developer Concentrations HE-960TM
MoreTMAH Conductivity Meter. Perfect for Controlling TMAH Developer Concentrations HE-960TM
Water Quality Meter with HART communication HQ-300
MoreWater Quality Meter with HART communication HQ-300
Wide range TMAH Concentration Monitor HE-960H-TM
MoreWide range TMAH Concentration Monitor HE-960H-TM
2-channel High Precision HF Concentration Monitor HF-SP-CU
More2-channel High Precision HF Concentration Monitor HF-SP-CU
2-Channel Resistivity Meter HE-960RW-GC(W)
More2-Channel Resistivity Meter HE-960RW-GC(W)
BHF Concentration Monitor, CS-137
MoreBHF Concentration Monitor, CS-137
Carbon Sensor Conductivity Meter (High concentration type) HE-960HC
MoreCarbon Sensor Conductivity Meter (High concentration type) HE-960HC
Carbon Sensor Conductivity Meter (Low concentration type) HE-480C-GC
MoreCarbon Sensor Conductivity Meter (Low concentration type) HE-480C-GC
Carbon Sensor Conductivity Meter HE-960LC
MoreCarbon Sensor Conductivity Meter HE-960LC
Carbon Sensor Resistivity Meter HE-960R-GC(W)
MoreCarbon Sensor Resistivity Meter HE-960R-GC(W)
Citric Acid Monitor HE-960CA
MoreCitric Acid Monitor HE-960CA
Dissolved Oxygen Monitor in Low Concentration HF HD-960L
MoreDissolved Oxygen Monitor in Low Concentration HF HD-960L
Dissolved Ozone Monitor HZ-960
MoreDissolved Ozone Monitor HZ-960
Fiber Optic Type Chemical Concentration Monitor CS-600F
MoreFiber Optic Type Chemical Concentration Monitor CS-600F
FPM Monitor CS-153
MoreFPM Monitor CS-153
H2O2 Monitor HZ-960HPO-M
MoreH2O2 Monitor HZ-960HPO-M
HF / HCl Concentration Monitor HF-960H
MoreHF / HCl Concentration Monitor HF-960H
HF-960M
MoreHF-960M
Low Concentration Type HF/HCl/NH3 Concentration Monitor
High Precision TMAH Concentration Monitor HE-960H-TM-S
MoreHigh Precision TMAH Concentration Monitor HE-960H-TM-S
High Precision, High Stability Chemical Concentration Monitor
MoreHigh Precision, High Stability Chemical Concentration Monitor
High Resistivity Meter HE-Z-100T
MoreHigh Resistivity Meter HE-Z-100T
High-speed response and compact chemical solution concentration monitor SC-1 Monitor, CS-131
MoreHigh-speed response and compact chemical solution concentration monitor SC-1 Monitor, CS-131
High-speed response and compact chemical solution concentration monitor TMAH/H2O2 Monitor, CS-139E
MoreHigh-speed response and compact chemical solution concentration monitor TMAH/H2O2 Monitor, CS-139E
Highly Sensitive Silica Monitor SLIA-300
MoreHighly Sensitive Silica Monitor SLIA-300
In-line Sensor & Auto Range Switching Concentration Monitor HF-960EM
MoreIn-line Sensor & Auto Range Switching Concentration Monitor HF-960EM
KOH Monitor HE-960H-KOH
MoreKOH Monitor HE-960H-KOH
Micro Volume pH Monitor UP-100
MoreMicro Volume pH Monitor UP-100
SC-2 Concentration Monitor, CS-152
MoreSC-2 Concentration Monitor, CS-152
Semiconductor process monitoring for SC-2 process
SPM Monitor CS-150
MoreSPM Monitor CS-150
Stand-alone Type Chemical Concentration Monitor CS-100 Series
MoreStand-alone Type Chemical Concentration Monitor CS-100 Series
TMAH Conductivity Meter. Perfect for Controlling TMAH Developer Concentrations HE-960TM
MoreTMAH Conductivity Meter. Perfect for Controlling TMAH Developer Concentrations HE-960TM
Wide range TMAH Concentration Monitor HE-960H-TM
MoreWide range TMAH Concentration Monitor HE-960H-TM
Automatic Total Nitrogen/Phosphorus Monitoring TPNA-500
MoreAutomatic Total Nitrogen/Phosphorus Monitoring TPNA-500
BHF Concentration Monitor, CS-137
MoreBHF Concentration Monitor, CS-137
Dissolved Ozone Monitor HZ-960
MoreDissolved Ozone Monitor HZ-960
Fiber Optic Type Chemical Concentration Monitor CS-600F
MoreFiber Optic Type Chemical Concentration Monitor CS-600F
FPM Monitor CS-153
MoreFPM Monitor CS-153
H2O2 Monitor HZ-960HPO-M
MoreH2O2 Monitor HZ-960HPO-M
HF-960M
MoreHF-960M
Low Concentration Type HF/HCl/NH3 Concentration Monitor
High Precision, High Stability Chemical Concentration Monitor
MoreHigh Precision, High Stability Chemical Concentration Monitor
High-speed response and compact chemical solution concentration monitor SC-1 Monitor, CS-131
MoreHigh-speed response and compact chemical solution concentration monitor SC-1 Monitor, CS-131
High-speed response and compact chemical solution concentration monitor TMAH/H2O2 Monitor, CS-139E
MoreHigh-speed response and compact chemical solution concentration monitor TMAH/H2O2 Monitor, CS-139E
Industrial MLSS meter HU-200SS (Four-Wire Analyzer)
MoreIndustrial MLSS meter HU-200SS (Four-Wire Analyzer)
Organic Pollutant Monitor OPSA-150
MoreOrganic Pollutant Monitor OPSA-150
SC-2 Concentration Monitor, CS-152
MoreSC-2 Concentration Monitor, CS-152
Semiconductor process monitoring for SC-2 process
Spectrometers - CP140 - Imaging Spectrograph
MoreSpectrometers - CP140 - Imaging Spectrograph
Spectrometers - H1034B
MoreSpectrometers - H1034B
OEM Imaging Scanning MONOCHROMATOR
Spectrometers - Miniature High Throughput Spectrometer (VS20)
MoreSpectrometers - Miniature High Throughput Spectrometer (VS20)
Spectrometers - Multi-channel spectrometers
MoreSpectrometers - Multi-channel spectrometers
Spectrometers - VS7000-PDA
MoreSpectrometers - VS7000-PDA
Highest SNR CMOS Mini-Spectrometer
Spectrometers - VS7000+
MoreSpectrometers - VS7000+
OEM CCD Mini-Spectrometers
Spectroscopy Solutions - Broadband Arc Lamp Light Source - KiloArc
MoreSpectroscopy Solutions - Broadband Arc Lamp Light Source - KiloArc
The brightest 1000W Xe and Hg/Xe arc lamps for UV-Visible-NIR applications
Spectroscopy Solutions - Tunable Deuterium Light Source – LSH-D
MoreSpectroscopy Solutions - Tunable Deuterium Light Source – LSH-D
Optimized design to provides 10 times more optical power in the UV that regular light source
Spectroscopy Solutions - Broadband Xe Light Source - PowerArc
MoreSpectroscopy Solutions - Broadband Xe Light Source - PowerArc
75W Xe Ozone free light source for UV-Visible-NIR applications
Spectroscopy Solutions - Deep Cooled NIR Scientific Cameras
MoreSpectroscopy Solutions - Deep Cooled NIR Scientific Cameras
TE and cryogenically cooled scientific cameras for ultra sensitivity from 800 nm to 2200 nm
Spectroscopy Solutions - Deep Cooled UV/Vis/NIR Scientific Cameras
MoreSpectroscopy Solutions - Deep Cooled UV/Vis/NIR Scientific Cameras
TE and cryogenically cooled CCD and EMCCD scientific cameras for ultra sensitivity from 200 nm to 1100 nm
Spectroscopy Solutions - Deep Cooled Vacuum Ultra Violet Scientific Cameras – Syncerity VUV
MoreSpectroscopy Solutions - Deep Cooled Vacuum Ultra Violet Scientific Cameras – Syncerity VUV
High energy camera detection that can interface with a vacuum chamber for measurement down to 120 nm
Spectroscopy Solutions - Double monochromator – Gemini 180
MoreSpectroscopy Solutions - Double monochromator – Gemini 180
Double additive grating scanning monochromator for low light applications
Spectroscopy Solutions - Dual Mode Analog/Photon Counting PMT - CoolOne
MoreSpectroscopy Solutions - Dual Mode Analog/Photon Counting PMT - CoolOne
Thermo-Electrically Cooled Photomultiplier Detection System
Spectroscopy Solutions - High Resolution Monochromators- FHR Series
MoreSpectroscopy Solutions - High Resolution Monochromators- FHR Series
640 and 1000 mm focal length high resolution spectrometers
Spectroscopy Solutions - Long Focal Length Spectrometer – 1000M
MoreSpectroscopy Solutions - Long Focal Length Spectrometer – 1000M
The ultimate spectrometer for ultra-high spectral resolution down to 0.006 nm
Spectroscopy Solutions - Microscope Illumination System – Scopelite 200
MoreSpectroscopy Solutions - Microscope Illumination System – Scopelite 200
Affordable, long life and maintenance free, high intensity microscope illumination system
Spectroscopy Solutions - Microscope Photomultiplier Photometers
MoreSpectroscopy Solutions - Microscope Photomultiplier Photometers
Ideal for Electrophysiology researchers to quantitate light intensity out of a microscope
Spectroscopy Solutions - Mid-Focal Length Imaging Spectrometer – iHR Series
MoreSpectroscopy Solutions - Mid-Focal Length Imaging Spectrometer – iHR Series
320 mm and 550 mm focal length high performance and versatile imaging spectrometers
Spectroscopy Solutions - Photon Counting PMT Detection System
MoreSpectroscopy Solutions - Photon Counting PMT Detection System
Self contained PMT housing for quantitative spectroscopy and imaging low light measurements
Spectroscopy Solutions - Random Access Monochromator – DeltaRAM
MoreSpectroscopy Solutions - Random Access Monochromator – DeltaRAM
High-speed wavelength switching monochromator for radiometric measurements
Spectroscopy Solutions - Short Focal Length Imaging Spectrometer - MicroHR Series
MoreSpectroscopy Solutions - Short Focal Length Imaging Spectrometer - MicroHR Series
140 mm focal length high performance and versatile imaging spectrometer
Spectroscopy Solutions - Short Focal Length Triple Grating Imaging Spectrographs – Triax Series
MoreSpectroscopy Solutions - Short Focal Length Triple Grating Imaging Spectrographs – Triax Series
Affordable 190 nm focal length imaging spectrometers offering maximum versatility and automation
Spectroscopy Solutions - Single Channel Detectors
MoreSpectroscopy Solutions - Single Channel Detectors
Large choice of PMTs, solid state, photoelectric detectors for custom spectroscopy solutions
Spectroscopy Solutions - Tunable 1000W Xe Light Source - Tunable KiloArc
MoreSpectroscopy Solutions - Tunable 1000W Xe Light Source - Tunable KiloArc
The brightest 1000W Xe continuously tunable light source from 180 nm to 2400 nm
Spectroscopy Solutions - Tunable 75W Xe Light Source - Tunable PowerArc
MoreSpectroscopy Solutions - Tunable 75W Xe Light Source - Tunable PowerArc
The brightest 75W Xe continuously tunable light source from 180 nm to 2400 nm
Spectroscopy Solutions - Tunable Tungsten Halogen Light Source – LSH-T
MoreSpectroscopy Solutions - Tunable Tungsten Halogen Light Source – LSH-T
Optimized design to provides high and flat optical power for NIR application
SPM Monitor CS-150
MoreSPM Monitor CS-150
Stand-alone Type Chemical Concentration Monitor CS-100 Series
MoreStand-alone Type Chemical Concentration Monitor CS-100 Series
Vacuum System - VUV Transmission
MoreVacuum System - VUV Transmission
Use of H20UVL for VUV transmission
VS7000-CCD-HD
MoreVS7000-CCD-HD
High Dynamic Range Mini-Spectrometer
VS7000-CCD-HS
MoreVS7000-CCD-HS
High Speed Miniature CCD Spectrometer