High-grade type Gas Monitor for Chamber Cleaning End Point Monitoring IR-400

Gas Monitor IR-400
Gas Monitor IR-400

The IR-400 offers real-time monitoring of the chamber cleaning end point during the deposition process. By optimizing the cleaning process, the IR-400 reduces cleaning time and gas usage. This reduction in cleaning gas usage leads to a reduction in chamber damage and increases the life times of all the systems components.

 

Segment: Semiconductor
Division: Dry Process Control
Base product
Manufacturing Company: HORIBA STEC Co. Ltd.
  • Multi gas monitoring (Supported SiF4 andCF4) (IR-422)
  • High sensitivity
  • Gas cell heating function up to 180 dec.C
  • Multi-display
  • Analog/Digital communication.

 

Benefits of real-time end-point monitoring with the IR-400

  • Reduce time for chamber cleans
  • Reduce usage of cleaning gases
  • Repeatable and predictable clean process
  • Longer lifetime of chamber components

 

Applications example

  • Monitoring chamber exhaust line

Monitoring chamber exhaust line

 

Measurement Techniques

Reliable, High-performance
Non-dispersive Infrared Absorptiometry (NDIR)

The infrared absorptiometry method employed by the IR-300 Series uses the principle of the absorption by gas molecules of the infrared light emitted from an infrared light source. A sample output from a sample that has absorbed the gas being measured is compared to a reference output with no absorbance, and the result is converted into a gas concentration. The use of this double beam method enables long-term, stable measurement results to be obtained.

 Reliable, High-performance Non-dispersive Infrared Absorptiometry (NDIR)

Reliable, High-performance Non-dispersive Infrared Absorptiometry (NDIR)

 

The optical system is made up of a light source, gas cell and double beam detectors. The stability of the double beam detector has been proven over a period of more than 40 years.

 

External Dimension

External Dimension of Gas Monitor IR-400

 

Sterilization Process in Food and Beverage Manufacturing
Sterilization Process in Food and Beverage Manufacturing

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