High-grade type Gas Monitor for Chamber Cleaning End Point Monitoring IR-400

Gas Monitor IR-400
Gas Monitor IR-400

The IR-400 offers real-time monitoring of the chamber cleaning end point during the deposition process. By optimizing the cleaning process, the IR-400 reduces cleaning time and gas usage. This reduction in cleaning gas usage leads to a reduction in chamber damage and increases the life times of all the systems components.

 

Segment: Semiconductor
Division: Dry Process Control
Base product
Manufacturing Company: HORIBA STEC Co. Ltd.
  • Multi gas monitoring (Supported SiF4 andCF4) (IR-422)
  • High sensitivity
  • Gas cell heating function up to 180 dec.C
  • Multi-display
  • Analog/Digital communication.

 

Benefits of real-time end-point monitoring with the IR-400

  • Reduce time for chamber cleans
  • Reduce usage of cleaning gases
  • Repeatable and predictable clean process
  • Longer lifetime of chamber components

 

Applications example

  • Monitoring chamber exhaust line

Monitoring chamber exhaust line

 

Measurement Techniques

Reliable, High-performance
Non-dispersive Infrared Absorptiometry (NDIR)

The infrared absorptiometry method employed by the IR-300 Series uses the principle of the absorption by gas molecules of the infrared light emitted from an infrared light source. A sample output from a sample that has absorbed the gas being measured is compared to a reference output with no absorbance, and the result is converted into a gas concentration. The use of this double beam method enables long-term, stable measurement results to be obtained.

 Reliable, High-performance Non-dispersive Infrared Absorptiometry (NDIR)

Reliable, High-performance Non-dispersive Infrared Absorptiometry (NDIR)

 

The optical system is made up of a light source, gas cell and double beam detectors. The stability of the double beam detector has been proven over a period of more than 40 years.

 

External Dimension

External Dimension of Gas Monitor IR-400

 

Gas Concentration Monitoring for Chamber Cleaning End Point Monitoring in Semiconductor Manufacturing Process
Gas Concentration Monitoring for Chamber Cleaning End Point Monitoring in Semiconductor Manufacturing Process
Sterilization Process in Food and Beverage Manufacturing
Sterilization Process in Food and Beverage Manufacturing

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