High Precision, High Stability Chemical Concentration Monitor

High Precision, High Stability Chemical Concentration Monitor CS-700

The HORIBA CS-700 chemical concentration monitor enables high performance measurement of the individual chemical constituents of complex chemistries used in the leading edge Semiconductor Manufacturing Processes.
By improving HORIBA's renowned spectroscopic measurement technology,  the CS-700 realizes up to 5X improvement in measurement performance.
Provides enhanced quality control which improves the Semiconductor Manufacturing Processes.

 

Segment: Semiconductor
Division: Wet Process Control
Base product
Manufacturing Company: HORIBA Advanced Techno Co. Ltd.

 

Suitable for controlling individual constituents of commercial chemistries.
  • Monitoring max 8 components with real time and high performance
  • No reagents required and zero sample consumption for reduced CoO (Cost of Ownership)
  • Simple Plug and Play installation

 

 

Measurement Range and Repeatability

Unit : mass%

 ComponentMeasurable rangeRepeatability
1st solutionHNO330.0 - 34.0±0.5
HF2.00 - 4.00±0.10
H3PO435.0 - 39.0±0.6
H2SiF60.00 - 3.00±0.50
H2O25.0 - 33.0±1.0

Conditions of measurement
1) Measurement interval: approx. 8 sec.
2) Moving average time :10 times
3) Atmospheric temperature, chemical temperature fluctuation: within +/- 1 degree C (period of time: 1hour). Sudden temperature change should be avoided
4) Condition of sample temperature: 20 to 30 degree C

  • Repeatability is the maximum deviation from average measured value over a 1 hour continuous measurement period.
  • The values in the above table are assigned analog output values between 4 - 20 mA. (makimum resistance of 500Ω)

Specifications Comparison with Previous Model

 

itemCS-100CS-700
Measurement principleAbsorption spectroscopic methodAbsorption spectroscopic method
Sample temperature20 to 30 Degree C20 to 30 Degree C
Ambient temperature20 to 25 Degree C20 to 30 Degree C
ComponentsMax. 4 componentsMax. 8 components
Chemical rangeMax. 4 rangesMax. 6 ranges
CommunicationParallel I/O, Analog output, RS-232CParallel I/O, Analog output, RS-232C
Analog output
(4-20 mA)
Max. 2 componentsMax. 6 components
Dimension205(W) X 329(D) X 269(H)mm218(W) X 391(D) X 213(H)mm
Power sourceDC 24VDC 24V(Same connecter of CS-100)
Consumable partsHalogen lampHalogen lamp (Same as CS-100 type)
WavelengthUV/NIRUV/NIR
Wetted materialPTFE, PFA, Sapphire or Quartz,PTFE, PFA, Sapphire,
Kalrez 4079 O-ring

Schematics

Chemical Concentration Monitoring in Wet Process in Semiconductor Manufacturing Process
Chemical Concentration Monitoring in Wet Process in Semiconductor Manufacturing Process
Readout47_Industrial_In-line_and_Multi_Component_Monitor_Using_Absorption_Spectroscopy_and_Its_Application
CategoryDocuments
Size 1.61 MB
FiletypePDF

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