High Precision TMAH Concentration Monitor HE-960H-TM-S

HE-960H-TM,HE-960H-KOH,HE-960H-TM-S

Accurately measures the concentration of TMAH (Tetra Methyl Ammonium Hydroxide), which is the main component of the photoresist developer solutions in semiconductor manufacturing. Repeatability: within +/- 0.003%. Measurement range : 0 - 3 %. Have the chemical resistant carbon sensor.

 

Segment: Semiconductor
Division: Wet Process Control
Base product
Manufacturing Company: HORIBA Advanced Techno Co. Ltd.

 

  • High precision. Repeatability: within +/- 0.003%.
  • Wide range measurement
        Concentration: 0 - 3%, Conductivity: 0 - 1000 mS/cm
  • Automatic display range switching
  • Enables three types of measurement: TMAH concentration, conductivity, and temperature
  • Chemical resistant carbon sensor
  • 24 V DC power supply
  • RoHS compliant

 

 

Model nameHE-960H-TM-S
Target of measurementTMAH
Measurement rangeConcentration: 0 - 3%, Conductivity: 0 - 1000mS/cm
RepeatabilityWithin +/- 0.003wt% (Temperature variation less than +/- 0.5℃, using equivalent input for conductivity)
LinearityWithin +/- 0.003wt% (Using equivalent input for conductivity)
Transmission outputNumber of output: 4
Contact outputOutputs: 5 points
Communication outputRS-485
Power supply24V DC +/- 10% 10W
Compatible sensorFES-510 Series
Wetted material of sensorGC, PFA, Karletz®

Schematics

Chemical Concentration Monitoring in Wet Process in Semiconductor Manufacturing Process
Chemical Concentration Monitoring in Wet Process in Semiconductor Manufacturing Process
Readout47-Conductivity Meter with Carbon Electrodes and Application for Densitometers
CategoryDocuments
Size 1.8 MB
FiletypePDF

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