High Resistivity Meter HE-Z-100T

High Resistivity Meter HE-Z-100T

Improved maintenance of equipment such as chillers with solvent management by monitoring deterioration of solvents

 

Segment: Semiconductor
Division: Wet Process Control
Base product
Manufacturing Company: HORIBA Advanced Techno Co. Ltd.

 

  • Measure very high resistivity liquid: 100TΩ・cm
  • Measure high temperature (max. 150 deg. C) / pressure (0.8 MPa)
  • Prevent corrosion or breakdown inside chillers

 

 

Model nameHE-Z-100T
Measurement range1 to 100 TΩ・cm (Transmission output range: 0 - 100 TΩ・cm ) 
Repeatability

Within +/- 10% R.D. or +/- 1TΩ・cm whichever greater

*Under the constant sample solution and ambient condition

LinearityWithin +/- 5% F.S. * Using equivalent input for resistivity
Chemical Concentration Monitoring in Wet Process in Semiconductor Manufacturing Process
Chemical Concentration Monitoring in Wet Process in Semiconductor Manufacturing Process

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