HZ-960HPO-M

Dissolved Ozone Monitor HZ-960,H2O2 Monitor HZ-960HPO-M

H2O2 Monitor

High stability measurement H2O2 concentration. The repeatability: FS +/- 0.2%. Can select 4 types of measurement range in-line detectors.

 

Segment: Semiconductor
Division: Wet Process Control
Base product
Manufacturing Company: HORIBA Advanced Techno Co., Ltd.

 

  • High precision. Repeatability: FS +/- 0.2%
  • Wide range measurement
         0 - 1000 ppm (ZH-10HPO Detector)
         0 - 4000 ppm (ZH-40HPO Detector)
         0 - 1 % (ZH-100HPO Detector)
         0 - 5 % (ZH-500HPO Detector)
  • Remote calibration
  • RoHS compliant

 

 

Specifications of HZ-960HPO-M
Corresponding detectorZH-10HPOZH-40HPOZH-100HPOZH-500HPO
Measurement range0 - 1000 ppm0 - 4000 ppm0 - 1%0 - 5%
Supply temperature5 - 30 deg.C5 - 80 deg.C
Chemical contact material of detectorPFA, PTFE, quartz glass
Supply pressureWithin 0.5 MPa
Repeatability+/- 0.2% of full scale
Linearity+/- 1.0% of full scale
Transmission outputNumber of output: 2
Contact inputNumber of output: 5
Communication outputRS-485
Power supplyRated voltage 24 +/- 10% V DC, 15W

Schematics

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