0.26
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Brochure-HZ-960HPO-Ｍ_HAE-T0140C
HZ-960HPO-M
H2O2 Monitor
High stability measurement H2O2 concentration. The repeatability: FS +/- 0.2%. Can select 4 types of measurement range in-line detectors.
Segment: Semiconductor
Division: Wet Process Control
Manufacturing Company: HORIBA Advanced Techno Co., Ltd.
- High precision. Repeatability: FS +/- 0.2%
- Wide range measurement
0 - 1000 ppm (ZH-10HPO Detector)
0 - 4000 ppm (ZH-40HPO Detector)
0 - 1 % (ZH-100HPO Detector)
0 - 5 % (ZH-500HPO Detector) - Remote calibration
- RoHS compliant
| Corresponding detector | ZH-10HPO | ZH-40HPO | ZH-100HPO | ZH-500HPO |
|---|---|---|---|---|
| Measurement range | 0 - 1000 ppm | 0 - 4000 ppm | 0 - 1% | 0 - 5% |
| Supply temperature | 5 - 30 deg.C | 5 - 80 deg.C | ||
| Chemical contact material of detector | PFA, PTFE, quartz glass | |||
| Supply pressure | Within 0.5 MPa | |||
| Repeatability | +/- 0.2% of full scale | |||
| Linearity | +/- 1.0% of full scale | |||
| Transmission output | Number of output: 2 | |||
| Contact input | Number of output: 5 | |||
| Communication output | RS-485 | |||
| Power supply | Rated voltage 24 +/- 10% V DC, 15W | |||
Schematics
