In-line Sensor & Auto Range Switching Concentration Monitor HF-960EM

In-line Sensor & Auto Range Switching Concentration Monitor HF-960EM

Measures a wide range of HF concentration from low concentration to undiluted liquid. The HF-960EM achieves high precision measurement by the auto-correction range switching function. Also has the capibility of cleanliness with all PFA sensors. Measurement range: 0 - 50%.

 

Segment: Semiconductor
Division: Wet Process Control
Base product
Manufacturing Company: HORIBA Advanced Techno Co. Ltd.

 

  • Wide range measurement, from low concentration to undiluted liquid. Measurement range: 0 - 50%.
  • High precision measurement by the auto-correction range switching function.
  • All PFA sensors, ideal for semiconductor processing
  • 24 V DC power supply
  • RoHS compliant

 

 

Specifications of HF-960EM
Model nameHF-960EM
Measurement rangeHF: 0 - 50%, HCl: 0 - 10%, Conductivity: 0 - 2000 mS/cm
Repeatability+/- 0.5% F.S. (in equivalent input)
Linearity+/- 0.5% F.S. (in equivalent input)
Transmission outputNumber of output: 4
Contact outputOutputs: 5 points
Contact inputInputs: 2 points
Communication outputRS-485
Power supplyDC 24 V +/- 10% 15W
Compatible sensorCM-520 Series
Wetted material of sensorPFA

Schematics

Semiconductor BEOL CMP in Semiconductor Manufacturing Process
Semiconductor BEOL CMP in Semiconductor Manufacturing Process
Chemical Concentration Monitoring in Wet Process in Semiconductor Manufacturing Process
Chemical Concentration Monitoring in Wet Process in Semiconductor Manufacturing Process

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