High-grade type Gas Monitor for Chamber Cleaning End Point Monitoring
The IR-400 offers real-time monitoring of the chamber cleaning end point during the deposition process. By optimizing the cleaning process, the IR-400 reduces cleaning time and gas usage. This reduction in cleaning gas usage leads to a reduction in chamber damage and increases the life times of all the systems components.
Do you have any questions or requests? Use this form to contact our specialists. * These fields are mandatory.