KOH Monitor HE-960H-KOH

HE-960H-TM,HE-960H-KOH,HE-960H-TM-S

High precision, wide-range KOH monitor having chemical resistance sensor. Measurement range : 0 - 20%.

 

Segment: Semiconductor
Division: Wet Process Control
Base product
Manufacturing Company: HORIBA Advanced Techno Co. Ltd.

 

  •  Wide range measurement
        Concentration: 0 - 20%, Conductivity: 0 - 1000 mS/cm
  • High precision
  • PFA Sensor

 

 

Model nameHE-960H-KOH
Target of measurementKOH
Measurement rangeConcentration: 0 - 20%, Conductivity: 0 - 1000mS/cm
RepeatabilityWithin +/- 0.5%R.D. or within 0.005wt% whichever is higher (Temperature variation less than +/- 0.5℃, using equivalent input for conductivity)
LinearityWithin +/- 0.5%R.D. or within 0.005wt% whichever is higher (Temperature variation less than +/- 0.5℃, using equivalent input for conductivity)
Transmission outputNumber of output: 4
Contact outputOutputs: 5 points
Communication outputRS-485
Power supply24V DC +/- 10% 10W
Compatible sensorFES-510 Series
Wetted material of sensorGC, PFA, Karletz®

Schematics

Chemical Concentration Monitoring in Wet Process in Semiconductor Manufacturing Process
Chemical Concentration Monitoring in Wet Process in Semiconductor Manufacturing Process
Readout47-Conductivity Meter with Carbon Electrodes and Application for Densitometers
CategoryDocuments
Size 1.8 MB
FiletypePDF

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