Liquid Auto Refill System LU Series

Liquid Auto Refill System LU Series

The LU Series offers uninterrupted, safe and reliable delivery of the liquid precursor to liquid material baking systems and injection systems. This leads to increased uptime, reduced operator handling and reduced risk of process contamination.

The LU Series includes a function for automatically implementing a remaining liquid purge sequence.

Using the LU Series, product throughput and maintenance efficiency is improved.

Segment: Semiconductor
Division: Fluid Control System
Base product
Manufacturing Company: HORIBA STEC Co. Ltd.
  • Vapour pressure monitoring function (patent pending) that checks the purge efficiency during the mother tank replacement comes as standard
  • A load cell monitoring the remaining amount of material in the mother tank is available as an option
  • Compact design, the LU-A1000 series uses an integrated gas system allowing for significant size reduction when compared with conventional fittings
  • Easy component replacement during routine maintenance
  • Degasifier module comes as standard reducing the risk of bubbles within the liquid, making it ideal to supply a variety of vaporization systems, including injection and baking type applications
  • Safety standards: SEMI S2/S8/S14, CE mark
  • Improved safety: a variety of monitoring devices provides total automatic control. The LU-A1000 series is equipped with an automatic emergency shutdown function that is activated should a system problem occur
  • Improved operability: operating sequences have been automated to prevent operation errors. Operations can also be easily controlled with a touch panel on the front of the unit.

 

Model

LU-A1000 series

Liquids supported

TEOS, TMOB, TMOP, TEOP, BTBAS

Supply method

Pressure movement from He gas

Gas supply pressure

For pressure movement: 0.3 to 0.6 MPa (G); For purge: 0.3 to 0.6 MPa (G), OP N2 0.6 to 0.7 MPa (G)

Tank

Maximum 5-gallon container can be attached (outside of production range)

Operation

Automatic supply/stop using external signal from supply system

Operation area display details

Pressure error display; When an alarm is triggered: Display hold function (manual reset); Liquid level display; Sequence, etc.

Gas connection

Refer to basic flow

Power source

AC 100 to 240 V, 50/60 Hz, 300 VA

Electricity connection

AC 100 to 240 V breaker connection, signal receptacle

External dimensions

See external dimensions diagram

  

* Please make decisions regarding the specifications above after meeting with STEC.

External Dimension

External Dimension of Liquid Auto Refill System LU Series

System Examples of LU-A1000 SeriesFlow Schematic of LU-A1000 Series 

Liquid Source Vaporization and Supply for Deposition and Etching in Semiconductor Manufacturing Process
Liquid Source Vaporization and Supply for Deposition and Etching in Semiconductor Manufacturing Process
Process Control and In-situ Measurement for Photovoltaic Manufacturing Process
Process Control and In-situ Measurement for Photovoltaic Manufacturing Process
Optical Fiber Manufacturing Process in Electrical Equipment
Optical Fiber Manufacturing Process in Electrical Equipment
Liquid Source Vaporization and Supply in Research and Testing Laboratories
Liquid Source Vaporization and Supply in Research and Testing Laboratories

REQUEST FOR INFORMATION

Do you have any questions or requests? Use this form to contact our specialists.