- Reticle inversion mechanism
- 0.5μm to 50μm selectability
- Single detection system
- Built-in and combination types
The PR-PD5 Particle Detection System has been designed to be integrated with any other system as a space-saving measure. Installing the PR-PD5 to the conveyor, or the reticle stocker, allows the performance of simultaneous inspection, while combining it with the cleaning device enables inspection during the cleaning process.
Particles on reticle/mask with or without pellicle
Laser scattering method
Detectable particle size
Pattern surface: 0.5 µm, Glass surface: 5.0 µm, Pellicle surface: 10.0 µm (* PSL equivalent)
Data mapping display on the FPD
Clean room or clean booth, class 100 or better
100 to 230 V AC, 7.5 to 5 A, 50/60 Hz, single phase
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