Mixed Injection System Liquid Vaporizer MV-2000 Series

Mixed Injection System Liquid Vaporizer MV-2000 Series

The MV-2000 Series achieves stable vaporization, even at low temperatures, using the new tornado flow method. This is suitable for vaporization a range of liquids even challenging sources such as "High-k", a liquid source which is pyrolyzed easily.

Segment: Semiconductor
Division: Fluid Control
Base product
Manufacturing Company: HORIBA STEC Co. Ltd.
  • Stable vaporization at low temperature using the new tornedo flow method
  • Higher flow rate vaporization (add the stability data)
  • Can vaporize a liquid source which is pyrolyzed easily

 

 
ModelMV-2000
Liquid MaterialAll liquids except those corrosive to stainless steel(ex. HCl, HF)
Setting TemperatureBy vaporization conditions(Control Valve : Max 140 ˚C Vaporizer : Max 200 ˚C)
Leak Integrity≤ 1 × 10-8 Pa·m3 /s (He)
Internal leak standard≤ 1 × 10-6 Pa·m3 /s (He)
Wetted partsSUS316L , PFA
Temperature SensorThermocouple type K (CA)
Pressure Resistance1MPa (G)
Standard FittingLiquid inlet: 1/8 VCR type Male Carrier gas inlet: 1/4 VCR type Female Gas outlet: 1/2 VCR type Male
Operating Temperature15 - 50 ˚C
OptionAir valve(Internal leak standard: ≤ 1×10-9 Pa · m3 / s(He) )
  • The generated flow rate may differ depending on the liquid material, amount of generation, generation conditions, etc. We will recommend the model most suited to your needs upon consultation.
  • The vaporizer has a heater, temperature sensor, and switch inside of it. Please contact us for more details on their specifications.

 

External Dimension

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Liquid Source Vaporization and Supply for Deposition and Etching in Semiconductor Manufacturing Process
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Process Control and In-situ Measurement for Photovoltaic Manufacturing Process
Optical Fiber Manufacturing Process in Electrical Equipment
Optical Fiber Manufacturing Process in Electrical Equipment
Liquid Source Vaporization and Supply in Research and Testing Laboratories
Liquid Source Vaporization and Supply in Research and Testing Laboratories

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