Multi Range/Multi Gas Digital Mass Flow Controller SEC-Z500X

Multi Range/Multi Gas Digital Mass Flow Controller SEC-Z500X

This is HORIBA's best selling model for digital mass flow controllers. It has multi-range/multi-gas functions enabling users to change the type of gas or full-scale flow rate on-site quickly and easily.
With high accuracy +/- 1.0% S.P,  piezo actuator valve, high speed response and being all-metal this mass flow controller is suitable for process yield improvement and simplified parts management. Digital/Analog, DeviceNet™, and EtherCAT® communications are all available.

View our MFC comparison chart here.

 

 

Segment: Semiconductor
Division: Fluid Control
Base product
Manufacturing Company: HORIBA STEC Co. Ltd.
  • High Accuracy ±1.0% S.P.
    This mass flow controller's linearity is compensated by a polynomial approximated curve and achieves high accuracy for all flow control ranges. For the purpose of advancement of actual gas accuracy, the calibration data of various process gases are measured by HORIBA STEC's standard gas measurement system.
  • High Speed Response
    Installed with the "Variable PID system", which can achieve 1 second response between any two set points. Variable PID is continuously changing depending on the flow point setting. This allows the PID factor to be optimized when the full scale flow and gases are changed.
  • Multi-Gas/Multi-Range Solution
    The configuration software makes it possible to change specifications quickly and easily. One key feature is the changes can be made without removing the mass flow controller from the gas panel or piping. This reduces the number of spare mass flow controllers required; saving both time and costs.

The Mass Flow Controller SEC-Z500X is suitable for various applications as well as semiconductor manufacturing. Read our Case Study and find out how the SEC-Z500X improved results for The Natioanl Oceanic & Atmospheric Administration: Case Study

Gas Fluid Control for Deposition and Etching Process in Semiconductor Manufacturing Process
Gas Fluid Control for Deposition and Etching Process in Semiconductor Manufacturing Process
Process Control and In-situ Measurement for Photovoltaic Manufacturing Process
Process Control and In-situ Measurement for Photovoltaic Manufacturing Process
Optical Fiber Manufacturing Process in Electrical Equipment
Optical Fiber Manufacturing Process in Electrical Equipment
Gas Mass Flow Control and Measurement in Research and Testing Laboratories
Gas Mass Flow Control and Measurement in Research and Testing Laboratories
Sterilization Process in Food and Beverage Manufacturing
Sterilization Process in Food and Beverage Manufacturing
Multi Range/Multi Gas Digital Mass Flow Controller SEC-Z500X Series_Case study
CategoryDocuments
Size 0.33 MB
FiletypePDF

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