Piezo Actuator Valve PV Series

Piezo Actuator Valve PV Series

The Piezo Actuator Valve PV Series consists of piezo actuator valves with metal diaphragms and metal O-rings. When combined with a pressure sensor or flow rate sensor and ratio control unit (PCU series) you can use the Piezo Actuator Valve PV Series to create a pressure control or flow rate control system.

 

Segment: Semiconductor
Division: Fluid Control
Base product
Manufacturing Company: HORIBA STEC Co. Ltd.

Benefits: 

  • Ultraclean due to an all metal construction
  • Wide flow range: from 1 CCM to 50 LM
  • High temperature models are available (PV-1000S/2000S)
  • Pressure control from an external unit

 

 

PV-1000

 

Flow Range1/5/100/200/500 CCM 1/2/5 LM (Inlet:atmospheric pressure•Outlet:vacuum•N2equiv)
Flow Control Range2 -100% F.S.
Valve Typenormally open / close
Input Signal0 - 5VDC
Responceless than 0.5 sec.
Operating Temperature0 - 50 °C
Operating Diffential PressureMAX. 300 kPa(a)(max,42psi)
Pressure Resistance1MPa
Leak Integrity5×10-12Pa•m3(He)

 

PV-2000

 

Flow Range10/20 LM
Flow Control Range2 -100% F.S.
Valve Typenormally open / close
Input Signal0 - 5VDC
Responceless than 0.5 sec.
Operating Temperature0 - 50 °C
Operating Diffential PressureMAX. 300 kPa(a)(max,42psi)
Pressure Resistance1MPa
Leak Integrity5×10-12Pa•m3(He)

 

External Dimension

 

Pressure Control and Exhaust Pressure Control for Deposition and Etching in Semiconductor Manufacturing Process
Pressure Control and Exhaust Pressure Control for Deposition and Etching in Semiconductor Manufacturing Process
Process Control and In-situ Measurement for Photovoltaic Manufacturing Process
Process Control and In-situ Measurement for Photovoltaic Manufacturing Process

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