Piezo Actuator Valve PV Series

Piezo Actuator Valve PV Series

The Piezo Actuator Valve PV Series consists of piezo actuator valves with metal diaphragms and metal O-rings. When combined with a pressure sensor or flow rate sensor and ratio control unit (PCU series) you can use the Piezo Actuator Valve PV Series to create a pressure control or flow rate control system.

 

Segment: Semiconductor
Division: Fluid Control
Base product
Manufacturing Company: HORIBA STEC Co. Ltd.

Benefits: 

  • Ultraclean due to an all metal construction
  • Wide flow range: from 1 CCM to 50 LM
  • High temperature models are available (PV-1000S/2000S)
  • Pressure control from an external unit

 

 

PV-1000

 

Flow Range1/5/100/200/500 CCM 1/2/5 LM (Inlet:atmospheric pressure•Outlet:vacuum•N2equiv)
Flow Control Range2 -100% F.S.
Valve Typenormally open / close
Input Signal0 - 5VDC
Responceless than 0.5 sec.
Operating Temperature0 - 50 °C
Operating Diffential PressureMAX. 300 kPa(a)(max,42psi)
Pressure Resistance1MPa
Leak Integrity5×10-12Pa•m3(He)

 

PV-2000

 

Flow Range10/20 LM
Flow Control Range2 -100% F.S.
Valve Typenormally open / close
Input Signal0 - 5VDC
Responceless than 0.5 sec.
Operating Temperature0 - 50 °C
Operating Diffential PressureMAX. 300 kPa(a)(max,42psi)
Pressure Resistance1MPa
Leak Integrity5×10-12Pa•m3(He)

 

External Dimension

 

Process Control and In-situ Measurement for Photovoltaic Manufacturing Process
Process Control and In-situ Measurement for Photovoltaic Manufacturing Process

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