- Higher productivity
The VM Series (Vapor Delivery Module) achieves higher productivity due to minimizing downtime as it does not require a traditional quartz bubbler exchange
- Reduced running costs
The FDM Series reduces consumption of POCl3: up to 30% lower price per kg
More than 99.8% uptime due to continuous production
Decrease the cost of POCl3 waste
Longer tool lifetime and lower maintenance costs due to the process line never being exposed to the atmosphere
Delivered by 20L canister reduces logistics, storage and handling costs
Fewer POCl3 exchanges and bottle returns result in lower labor costs
- Improved process stability
The VM Series keeps the liquid level ”High” resulting in the pick-up rate being more stable than a traditional quartz bubbler
There is no affect by liquid level due to the bubbler being continually refilled
No bubbler exchanges are needed resulting in no exchange mistakes
There is no affect from ambient temperature fluctuactions
Sheet resistance is more stable than traditional bubblers resulting in improved sheet resistance repeatability and reproducibility.
- Improved safety
No more quartz. The VM Series is made from PFA vessel which is much more robust than quartz, no handling, exchanges or refilling of quartz bubblers are needed as it does not require periodical exchanges resulting in less opportunities for human error.
POCl3 is delivered in 20L ETFE lined stainless steel containers and contained in fixed and robust PFA vessel.
Robust, leak tight bubbler housing with N2 blanket and connected to facility exhaust
Integrated liquid leak and gas leak detection
Wetted lines fully purged and leak checked automatically.
- Improved reliability
POCl3 is hydrophilic and produces phosphoric acid which can cause corrosion or crystallization. A normal bubbler requires periodical exchanges and when a bubbler is exchanged the possibility of contact with air increases. The HORIBA POCl3 Auto Refill System does not require exchanges of the bubbler resulting in a very low chance that POCl3 tubing makes contacts with the air.