POCl3 Auto Refill System FDM Series

POCl3 Auto Refill System FDM Series

HORIBA's Award Winning Fluid Delivery System (FDM Series) has revolutionised the POCl3 diffusion process by developing a system to automatically deliver bulk liquid POCl3 in 20 litre ETFE lined stainless steel canisters to multiple fixed plastic bubbler vessels.

The FDM and VM series are used for n-type diffusion layers as a dopant in manufacturing crystal silicon-based solar cell.
The system can also be used in the BBr3 diffusion process, improving process stability, increasing uptime, reducing logistics and labour costs and higher safety.



Segment: Semiconductor
Division: Fluid Control System
Base product
Manufacturing Company: HORIBA STEC Co. Ltd.
  1. Higher productivity
    The VM Series (Vapor Delivery Module) achieves higher productivity due to minimizing downtime as it does not require a traditional quartz bubbler exchange
  2. Reduced running costs
    The FDM Series reduces consumption of POCl3: up to 30% lower price per kg
    More than 99.8% uptime due to continuous production
    Decrease the cost of POCl3 waste
    Longer tool lifetime and lower maintenance costs due to the process line never being exposed to the atmosphere
    Delivered by 20L canister reduces logistics, storage and handling costs
    Fewer POCl3 exchanges and bottle returns result in lower labor costs
  3. Improved process stability
    The VM Series keeps the liquid level ”High” resulting in the pick-up rate being more stable than a traditional quartz bubbler
    There is no affect by liquid level due to the bubbler being continually refilled
    No bubbler exchanges are needed resulting in no exchange mistakes
    There is no affect from ambient temperature fluctuactions
    Sheet resistance is more stable than traditional bubblers resulting in improved sheet resistance repeatability and reproducibility.
  4. Improved safety
    No more quartz. The VM Series is made from PFA vessel which is much more robust than quartz, no handling, exchanges or refilling of quartz bubblers are needed as it does not require periodical exchanges resulting in less opportunities for human error.
    POCl3 is delivered in 20L ETFE lined stainless steel containers and contained in fixed and robust PFA vessel.
    Robust, leak tight bubbler housing with N2 blanket and connected to facility exhaust
    Integrated liquid leak and gas leak detection
    Wetted lines fully purged and leak checked automatically.
  5. Improved reliability
    POCl3 is hydrophilic and produces phosphoric acid which can cause corrosion or crystallization. A normal bubbler requires periodical exchanges and when a bubbler is exchanged the possibility of contact with air increases. The HORIBA POCl3 Auto Refill System does not require exchanges of the bubbler resulting in a very low chance that POCl3 tubing makes contacts with the air.


Liquids supported

POCl3, BBr3. Liquids compatible with pfa and ptfe
Process lines4 x independent Coaxial, N2 purged process lines to deliver liquid to 4 x furnaces
Liquid line connectionsAll liquid line connections are housed inside cabinets that are connected to facility exhaust
Delivery distance limitTotal length of supply/return line 50m
Differential pressure sensor with alarmCheck for cabinet or Coaxial tubing leaks
Leak detectionIntegrated liquid and gas leak detection
Over pressure protectionSafety burst disk
Supply methodPressurise bulk canister
Bulk canisterMaximum 38 L (see diagram for dimensions)
Receiving systemMaximum 20 HORIBA VM Advanced Bubblers
Wetted partsPFA and PTFE
Pressure Measurement points

1.   Operation line 1 MPa(G) F.S.

2.   Purge line 500 kPa(G) F.S.

3.   Bulk canister and pressurised leak check of wetted parts 300 kPa(G) F.S.

4.   Vacuum leak test and purge check function 100 kPa(A) F.S.
Liquid removal methodAutomatic N2 and vacuum cycle purge with automatic purge check function
CommunicationsEtherNET communication between refill system and HORIBA Advanced Bubbler VM
Bulk canister scale0 to 100 kg (gross)
Noise<60 dB (A) at 1 m
Working environment15˚C to 35˚C ≤ 85% relative humidity
Width1200 mm
Depth605 mm
Height (including light tower)2635 mm
Weight375 kg
Safety standardsCE, designed to SEMI S2
Power requirements100~240 VAC 50/60 Hz 6 A ~ 12 A


Canister Dimensions

POCl3 Auto Refill System FDM Series

POCl3 Auto Refill System FDM Series

*subject to change

Automatic Refill System (FDM 1100) Features:

  • Robust, sealed and exhausted housing
  • Cabinet differential pressure with alarm
  • Integrated gas leak detection
  • Touch panel user interface with remote access for troubleshooting
  • Lockable doors and slide out canister retainer with safety interlock
  • Canister scale
  • Integrated safety reservoir with liquid leak detection


Bubbler (VM) Features:

Liquid temperature is measured in the VM. The flow algorithm calculates the required carrier gas flow through the bubbler based on the measurement of temperature, pressure and vapor pressure.

  • Auto refill liquid shut off valve
  • Robust N2-rich sealed housing
  • Vision Panel
  • Lockable door
  • Fixed PFA bubbler vessel
  • Integrated high performance single board computer
  • Integrated safety reservoir with liquid leak detection
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