Reticle/Mask Particle Detection System
The PR-PD2 Particle Detection System enables fine particle detection down to 0.35μm and also boasts a multi-stage sorter plus has a full range of communication functions. High-throughput measurement is possible on all surfaces from basic reticle and mask to glass and pellicle.
Polarized laser scattering method
Reticle/mask with or without pellicle
Argon laser 488 nm, 10 mW
5" x 5", 6" x 6", 2.3 to 6.3 mm thickness (maximum 1/4")
Thickness: 0.865 to 2.85 µm (±0.2 µm)
Detectable particle size
Pattern surface: 0.35 µm or larger
Standard mode: More than 90% of 0.35 µm particles.
Particle level setting
Pattern surface: 0.25 to 10 (3 steps)
Approx. 7 min from inspection start (switch ON) to map display for two-surface inspection.
Shape: Square, rectangle, circle
LCD screen observed from top and bottom side.
Automatic review (skip) function, Coordinate origin setting/rotation compensation function, Inspection center function, Map display insert/delete function, Bar code ready (Hard ware option)
Pellicle only inspection, Mask blank inspection, Inspection of additional substrate size, 2 way data communication (GEM or SECS2)
1710 (W) x 1540 (H) x 1400* (D) mm
Approx. 1000kg/2222 lbs
Clean bench: Class 10 or better
200/210/220/240 V AC ±10 V (Customer specified), single phase 4k VA, 50/60 Hz
Pressure difference: 8.0 x 104 Pa or more 50 L/min.
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