Principle | Polarized laser scattering method |
Inspection object | Reticle/mask with or without pellicle |
Detector | Photomultiplier |
Light source | Argon laser 488 nm, 10 mW |
Reticle/mask size | 5" x 5", 6" x 6", 2.3 to 6.3 mm thickness (maximum 1/4") Option: 3" x 5", 7" x 7", Ø7-1/4 with holder, 230 mm |
Pellicle | Thickness: 0.865 to 2.85 µm (±0.2 µm) Frame height: Glass surface (upper): 2.5 to 4.0 mm Pattern surface (lower): 2.5 to 6.3 mm Frame size: Differs depend on reticle case. |
Detectable particle size | Pattern surface: 0.35 µm or larger Glass surface: 5 µm or larger Pellicle surface: 10 µm or larger (PSL equivalent diameter) |
Detectability | Standard mode: More than 90% of 0.35 µm particles. 5-inspection integrated mode: More than 93% of 0.35 µm particles. |
Particle level setting | Pattern surface: 0.25 to 10 (3 steps) Glass surface: 1.5 to 30.0 (3 steps) Pellicle surface: 4 to 99 (3 steps) |
Inspection time | Approx. 7 min from inspection start (switch ON) to map display for two-surface inspection. Approx. 1 min from inspection end (End switch ON) to unload. (Area: 100 5 100 mm/High through mode) |
Inspection area | Shape: Square, rectangle, circle Area: 5" x 5": 10 x 10 to 105 x 110 mm or Ø10 to Ø105 mm 6" x 6": 10 x 10 to 127 x 139 mm or Ø10 to Ø127 mm 7" x 7": 10 x 10 to 160 x 160 mm or Ø10 to Ø160 mm (Option) Actual inspection area differs with reticle support stage and pellicle size. (7", 230 mm Option) |
Inspection result | LCD display: Map: Results for the entire inspection area, and results of magnifying the main map with X-Y coordinates for particle positions. |
Particle observation | LCD screen observed from top and bottom side. Magnification: 220 x, 440 x, 1100 x (bottom side) 440 x fixed (top side) Illumination: Bright/dark-field illumination, combined with top light. |
Standard function | Automatic review (skip) function, Coordinate origin setting/rotation compensation function, Inspection center function, Map display insert/delete function, Bar code ready (Hard ware option) |
Optional functions | Pellicle only inspection, Mask blank inspection, Inspection of additional substrate size, 2 way data communication (GEM or SECS2) |
Dimensions | 1710 (W) x 1540 (H) x 1400* (D) mm 67.3 (W) x 60.6 (H) x 55.1* (D) in. *Maximum width including a status lamp and a duct. |
Weight | Approx. 1000kg/2222 lbs |
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UTILITIES |
Installation site | Clean bench: Class 10 or better Temperature: 23±1°C |
Power | 200/210/220/240 V AC ±10 V (Customer specified), single phase 4k VA, 50/60 Hz |
Vacuum source | Pressure difference: 8.0 x 104 Pa or more 50 L/min. |