PR-PD3

Compact Reticle/Mask Particle Detection System PR-PD3

Compact Reticle/Mask Particle Detection System

The PR-PD3 Particle Detection System offers excellent throughput, a dependable optical system, and functions that reduce false detections. These features are packaged together in a compact system that is designed to minimize running costs. The PR-PD3 is capable of great versatility thanks to its 0.5 μm detection sensitivity.

Segment: Semiconductor
Division: Metrology
Manufacturing Company: HORIBA, Ltd.
  • Compact design
  • Low maintenance and operating costs
  • Effective function for countering erroneous detection.

 Attribute

Specification Value

  

Inspection object

Particles on reticle/mask with or without pellicle

Principle

Laser scattering method

Inspection time

Approx. 7 min/2 surfaces (5 inch reticle), Approx. 7 min from inspection start (switch ON) to test result display for two surface (5 inchs) inspection

* High throughput model specific to the glass/pellicle (approx. 4 min. for two surface inspection) is also available.

Detectable particle size

Pattern surface: 0.5 µm, Glass surface: 5.0 µm, Pellicle surface: 10.0 µm (* PSL equivalent)

Reticle size

5, 6 or 7 inch (Please specify when ordering.)

Reticle cassette (Please specify when ordering)

Applicable to the HORIBA standard cassette for 5, 6, 7 inches as well as stepper cases unique to individual maker for 5, 6 inches. (Single size of reticle and cassette handling is the standard. Contact us as to the multiple cassette handling system.)

Inspection result

Data mapping display on the FPD

Dimensions

Approx. 900 (W) x 1350 (D) x 1590 (H) mm
Approx. 35.4 (W) x 53.1 (D) x 62.6 (H) in
(Dimensions will vary depending on the reticle cassette specifications.)

 

Utilities

Installation site

Clean room or clean booth, class 100 or better

Temperature

23 ±1°C

Power

100 to 230 V AC, 7.5 to 5 A, 50/60 Hz, single phase

Vacuum source

Pressure difference 8.0 x 104 Pa or more, 50 L/min

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