PR-PD5

Low-cost ReticleMask Particle Detection System PR-PD5

Low-cost Reticle/Mask Particle Detection System

The PR-PD5 Particle Detection System has been designed to be integrated with any other system as a space-saving measure. Installing the PR-PD5 to the conveyor, or the reticle stocker, allows the performance of simultaneous inspection, while combining it with the cleaning device enables inspection during the cleaning process.

 

Segment: Semiconductor
Division: Metrology
Base product
Manufacturing Company: HORIBA, Ltd.
  • Reticle inversion mechanism
  • 0.5μm to 50μm selectability
  • Single detection system
  • Built-in and combination types

Inspection object

Particles on reticle/mask with or without pellicle

Principle

Laser scattering method

Detectable particle size

Pattern surface: 0.5 µm, Glass surface: 5.0 µm, Pellicle surface: 10.0 µm (* PSL equivalent)

Inspection result

Data mapping display on the FPD

 

Utilities

Installation site

Clean room or clean booth, class 100 or better

Temperature

23 ±1°C

Power

100 to 230 V AC, 7.5 to 5 A, 50/60 Hz, single phase

REQUEST FOR INFORMATION

Do you have any questions or requests? Use this form to contact our specialists.

Related products

Compact Reticle/Mask Particle Detection System PR-PD3
MoreCompact Reticle/Mask Particle Detection System PR-PD3
PR-PD2
MorePR-PD2
Reticle/Mask Particle Detection System
PR-PD2BLI
MorePR-PD2BLI
Blanks Mask Particle Detection System
Reticle / Mask Particle Detection System PR-PD2HR
MoreReticle / Mask Particle Detection System PR-PD2HR
Reticle/Mask Particle Remover RP-1
MoreReticle/Mask Particle Remover RP-1
AP-370 series
MoreAP-370 series
Air Pollution Monitor
APDA-372
MoreAPDA-372
Ambient Dust Monitor
Compact Reticle/Mask Particle Detection System PR-PD3
MoreCompact Reticle/Mask Particle Detection System PR-PD3
Partica LA-960
MorePartica LA-960
Laser Scattering Particle Size Distribution Analyzer
Partica mini LA-350
MorePartica mini LA-350
Laser Scattering Particle Size Distribution Analyzer
PR-PD2
MorePR-PD2
Reticle/Mask Particle Detection System
PR-PD2BLI
MorePR-PD2BLI
Blanks Mask Particle Detection System
Reticle / Mask Particle Detection System PR-PD2HR
MoreReticle / Mask Particle Detection System PR-PD2HR