PR-PD5

Low-cost Reticle/Mask Particle Detection System

The PR-PD5 Particle Detection System has been designed to be integrated with any other system as a space-saving measure. Installing the PR-PD5 to the conveyor, or the reticle stocker, allows the performance of simultaneous inspection, while combining it with the cleaning device enables inspection during the cleaning process.

Segment: Semiconductor

Division: Metrology

Manufacturing Company: HORIBA, Ltd.

Features
Specifications

Reticle inversion mechanism
0.5μm to 50μm selectability
Single detection system
Built-in and combination types

Inspection object	Particles on reticle/mask with or without pellicle
Principle	Laser scattering method
Detectable particle size	Pattern surface: 0.5 µm, Glass surface: 5.0 µm, Pellicle surface: 10.0 µm (* PSL equivalent)
Inspection result	Data mapping display on the FPD

Utilities
Installation site	Clean room or clean booth, class 100 or better
Temperature	23 ±1°C
Power	100 to 230 V AC, 7.5 to 5 A, 50/60 Hz, single phase