SC-2 Concentration Monitor, CS-152

CS-100 Seriesr, CS-137-153-152-150-100-153N-139E

Semiconductor process monitoring for SC-2 process

The CS-152 standard clean monitor is a high-precision chemical concentration monitor designed for use with the SC-2 solutions used in semiconductor-manufacturing cleaning processes. Featuring fast response and a compact size, the CS-152 continually monitors the concentrations of the various components of the SC-2 solutions (HCl/H2O2/H2O) used to remove metal ions. Feedback control based on the monitor output is used to keep the concentrations of the SC-2 solutions within the allowable ranges and to eliminate unnecessary replacement of chemicals. A short measuring cycle allows the accurate tracking of chemical concentrations, while the compact design facilitates integration with a cleaning device.

 

Segment: Semiconductor
Division: Wet Process Control
Base product
Manufacturing Company: HORIBA Advanced Techno Co. Ltd.

 

  • Short 3-second measurement cycle supports concentration control for 300-mm processes
    A short measurement cycle of approximately three seconds makes it possible to track concentrations very close to real time. Supports fine-tuned concentration control for batch-type-bath as well as single-bath cleaning devices.
  • Compact design helps reduce cleaning-device footprint
    The compact design reduces the monitor's footprint by about a third*, reducing the amount of space required by the cleaning device. The monitor is easily integrated with the cleaning device.
    *Based on comparison with the HORIBA CS-342 series.
  • Reduces lot defects in the cleaning process for improved yield
    Output from the monitor is used for automated spiking control of the SC-2 solutions, enabling cleaning with a high reproducibility rate. As a result, lot defects decrease in the cleaning process, which helps to boost the overall yield.
  • Fully automatic measurement and simple control
    All the user has to do is set up the SC-2 solution supply. Measurement is fully automatic, so no user control is required once the measurement has begun. Air is used for reference spectral measurement, removing the need for a utility water supply.
  • Comprehensive measures to eliminate air bubbles enable measurement of high-temperature samples
    A built-in bubble removal function removes air bubbles immediately before the flow cell, allowing continuous measurement of the solution as it is flowing. If the monitor has an integrated cooling unit, high-temperature samples can be sent directly to the monitor. Temperature compensation is carried out automatically.
  • The monitor uses a low-voltage (24 V DC) with a load of approximatley 45 W gives good energy efficiency. An internal leakage sensor is installed to detect solution leaks, so that the supply of SC-2 solutions can be shut off in the event of an emergency.

 

 

Model

CS-152

CS-152C

Model specifications

No cooling unit

Integrated cooling unit

Measurement sample

SC-2 (Hydrochloric acid/Hydrogen peroxide aqueous solution)

Measurement principle

Absorption spectrometry

Concentration computation principle

Temperature-compensated multivariate analysis

Measurement range

HCl: 0.00 to 2.00 %/0.00 to 10.00 %
H2O2: 0.00 to 2.00 %/0.00 to 10.00 %
H2O: 96.0 to 100.0 %/80.0 to 100.0 %

Reproducibility

HCl: ±0.15 %/±0.20 %

(Peak to peak)

 

H2O2: ±0.15 %/±0.20 %
H2O: ±1.5 %/±1.5 %

Chemical

conditions

 

Temperature

20 to 30 °C

20 to 80 °C

Flow rate

20 to 60 ml/min.

20 to 40 ml/min.

Pressure

0.10 to 0.20 MPa

Measurement cycle

Approx. 3 seconds minimum

Equipment temperature

20 to 25 °C

Operation panel

1)Temperature level display:
Hydrochloric acid, Hydrogen peroxide, Water

2)Alarm display (Hydrochloric acid, Hydrogen peroxide):
Concentration low-low limit, Concentration low limit,
Concentration high limit, Concentration high-high limit

3)Alarm value settings (Hydrochloric acid, Hydrogen peroxide):
Concentration low-low limit, Concentration low limit,
Concentration high limit, Concentration high-high limit

Serial input/output

RS-232C
1)Concentration data:
Hydrochloric acid, Hydrogen peroxide, Water

2)Alarm value settings (Hydrochloric acid, Hydrogen peroxide):
Concentration low-low limit, Concentration low limit,
Concentration high limit, Concentration high-high limit

Parallel input

12 to 30 V DC (photocoupler insulated)
Parallel concentration alarm (ON/OFF)

Parallel output

Maximum current when open collector output is ON: 5 mA
Maximum voltage when open collector output is OFF: 30 V

1)Alarm output (Hydrochloric acid, Hydrogen peroxide):
Concentration low-low limit, Concentration low limit,
Concentration high limit, Concentration high-high limit

2)Device error (including liquid leakage)

3)Under measurement

Analog output

4 to 20 mA (2 outputs: HCl concentration, H2O concentration
The analog output can be prepared to correspond to each
requirement by users. (Please specify when ordering.)

Power

24 V DC ±10%, 2 A

Dimensions

205 (W) x 329 (D) x 269 (H) mm
8.5 (W) x 13 (D) x 10.6 (H) in

291 (W) x 329 (D) x 269 (H) mm
11.5 (W) x 13 (D) x 10.6 (H) in

Mass

Approx. 11 kg

Approx. 12 kg

Connection pipe size

For inlet and outlet: Outer diameter 3 mm (inner diameter 2 mm)

Pipe connection

Nippon Pillar Super type

Utilities

Instrumentation air for driving air valve:
0.3 to 0.5 MPa (Piping outer diameter: 4 mm)

Chemical Concentration Monitoring in Wet Process in Semiconductor Manufacturing Process
Chemical Concentration Monitoring in Wet Process in Semiconductor Manufacturing Process

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