Gas Mass Flow Control and Measurement in Research and Testing Laboratories
SEC-400 series
Mass flow controllers
The SEC-400 series mass flow controller is used in a wide variety of industries and markets all over the world. It is installed with thermal valves and offers reliable control capabilities.
Segment: Semiconductor
Division: Fluid Control
Manufacturing Company: HORIBA STEC, Co., Ltd.
- High accuracy: +/- 0.5% F.S.:SEC-405 (limited gas compatibility)
- Wide range of flow rate control: from 0.1 CCM to 200 SLM (N2)　　　　　　　　　　　　　　　　　　　　　　　　　　　　　　　　　　　
- Low cost models are available: cost effective model: SEC-400MK3/500MK3.
