SEC-400 series

Mass flow controllers SEC-400 series

Mass flow controllers

The SEC-400 series mass flow controller is used in a wide variety of industries and markets all over the world. It is installed with thermal valves and offers reliable control capabilities.

 

Segment: Semiconductor
Division: Fluid Control
Base product
Manufacturing Company: HORIBA STEC Co. Ltd.
  • High accuracy: +/- 0.5% F.S.:SEC-405 (limited gas compatibility)
  • Wide range of flow rate control: from 0.1 CCM to 200 SLM (N2)                                   
  • Low cost models are available: cost effective model: SEC-400MK3/500MK3.

 

 

SEC-400 Specifications

External Dimension

Mass flow controllers SEC-400 series

Gas Mass Flow Control and Measurement in Research and Testing Laboratories
Gas Mass Flow Control and Measurement in Research and Testing Laboratories

REQUEST FOR INFORMATION

Do you have any questions or requests? Use this form to contact our specialists.

Product accessories

Control unit PE-D20
MoreControl unit PE-D20
Conversion adapters CA series
MoreConversion adapters CA series
Dedicated power sources PE Series
MoreDedicated power sources PE Series
Display unit DU series
MoreDisplay unit DU series
Mass Flow Checker MFT-20
MoreMass Flow Checker MFT-20
Monitor unit PE-D10
MoreMonitor unit PE-D10
PE-S7
MorePE-S7
Signal cables and conversion adapters SC series
MoreSignal cables and conversion adapters SC series
SU-503ED/502EA
MoreSU-503ED/502EA

Related products

Capacitance Manometer VG Series
MoreCapacitance Manometer VG Series
Digital Mass Flow Controller SEC-N100 Series
MoreDigital Mass Flow Controller SEC-N100 Series
Mass Flow Controller SEC-E Series
MoreMass Flow Controller SEC-E Series
Multi Range/Multi Gas Digital Mass Flow Controller SEC-Z500X
MoreMulti Range/Multi Gas Digital Mass Flow Controller SEC-Z500X
SEC-R100 Series
MoreSEC-R100 Series
Digital Mass Flow Controller
CRITERION D500
MoreCRITERION D500
Pressure Insensitive Mass Flow Module
Digital Mass Flow Controller SEC-N100 Series
MoreDigital Mass Flow Controller SEC-N100 Series
High Temperature Digital Mass Flow Controller SEC-8000 F/D/E Series
MoreHigh Temperature Digital Mass Flow Controller SEC-8000 F/D/E Series
Mass Flow Controller SEC-E Series
MoreMass Flow Controller SEC-E Series
Multi Range/Multi Gas Digital Mass Flow Controller SEC-Z500X
MoreMulti Range/Multi Gas Digital Mass Flow Controller SEC-Z500X
SEC-R100 Series
MoreSEC-R100 Series
Digital Mass Flow Controller
SEC-Z700X Series
MoreSEC-Z700X Series
Pressure Insensitive Mass Flow Controller
Digital Mass Flow Controller SEC-N100 Series
MoreDigital Mass Flow Controller SEC-N100 Series
High Temperature Digital Mass Flow Controller SEC-8000 F/D/E Series
MoreHigh Temperature Digital Mass Flow Controller SEC-8000 F/D/E Series
LF-F/LV-F Series
MoreLF-F/LV-F Series
Digital Liquid Mass Flow Meters / Controllers
Mass Flow Controller SEC-E Series
MoreMass Flow Controller SEC-E Series
Multi Range/Multi Gas Digital Mass Flow Controller SEC-Z500X
MoreMulti Range/Multi Gas Digital Mass Flow Controller SEC-Z500X
SEC-R100 Series
MoreSEC-R100 Series
Digital Mass Flow Controller
SEC-Z700X Series
MoreSEC-Z700X Series
Pressure Insensitive Mass Flow Controller