SEC-400 series

Mass flow controllers SEC-400 series

Mass flow controllers

The SEC-400 series mass flow controller is used in a wide variety of industries and markets all over the world. It is installed with thermal valves and offers reliable control capabilities.

 

Segment: Semiconductor
Division: Fluid Control
Base product
Manufacturing Company: HORIBA STEC Co. Ltd.
  • High accuracy: +/- 0.5% F.S.:SEC-405 (limited gas compatibility)
  • Wide range of flow rate control: from 0.1 CCM to 200 SLM (N2)                                   
  • Low cost models are available: cost effective model: SEC-400MK3/500MK3.

 

 

SEC-400 Specifications

External Dimension

Mass flow controllers SEC-400 series

Gas Mass Flow Control and Measurement in Research and Testing Laboratories
Gas Mass Flow Control and Measurement in Research and Testing Laboratories

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Product accessories

Control unit PE-D20
MoreControl unit PE-D20
Conversion adapters CA series
MoreConversion adapters CA series
Dedicated power sources PE Series
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Display unit DU series
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Mass Flow Checker MFT-20
MoreMass Flow Checker MFT-20
Monitor unit PE-D10
MoreMonitor unit PE-D10
PE-S7
MorePE-S7
Signal cables and conversion adapters SC series
MoreSignal cables and conversion adapters SC series
SU-503ED/502EA
MoreSU-503ED/502EA

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