SEC-R100 Series

Digital Mass Flow Controller

The digital mass flow controller SEC-R100 focuses on non-semiconductor applications, where high levels of product performance, quality and integrity are needed, such as vacuum coating, bioreactor, food & beverage, analytical, etc.

With this mass flow controller high accuracy (+/-1.0% S.P.) and performance are achieved without the high cost plus the multi gas/multi range function can be used for the nine most popular gases.

Digital (PROFIBUS)/Analog communications and 24 VDC power supply are available.

Segment: Semiconductor

Division: Fluid Control

Manufacturing Company: HORIBA STEC, Co., Ltd.

Multi Gas / Multi Range*
- User can change gas type and full scale range with free software
- Reduce stock
- Increased flexibility
High Accuracy ±1.0% S.P.
≦1 second response across the full flow rate range
High performance Solenoid Valve
O-ring material - Viton™
Fittings - ¼” Swagelok equivalent
Digital / Analog communication
- Profibus DP-V0
- Analog 0-5, 0-10 VDC,4-20mA
24 V DC power supply
RoHS compliant

*Gas selection from nine gases

Model Name	SEC-R116	SEC-R126
Full-scale flow rate (N2 conversion flow rate)	< 10LM	< 50LM
Compatible gas	N2, O2, Air, H2, He, CH4, C3H8, Ar, CO2
Flow rate control range	2-100%F.S.
Accuracy	±1.0%S.P (Flow rate >30%F.S.)± 0.3%F.S. (Flow rate ≦ 30%F.S.)
Operation temperature	5 to 50 (recommended temperature range: 15 to 45℃）
Response	≦ 1second over full flow rate range
Valve type	Normally Closed
Linearity	within +/- 0.5% of F.S.
Repeatability	within +/- 0.2% of F.S.
Power	24VDC （13 to 32VDC）7.5VA
Digital	Profibus DP-V0
Analog	0-5(10)VDC, 4-20mA
Standard fitting	1/4” Swagelok equivalent
Leak integrity	≦1×10-10Pa・m3/s
MAX. Operating pressure	450kPa (G)
Operating differential pressure	50 to 300kPa (d)＞3LM：100 to 300kPa (d)	200 to 300kPa (d)
Wetted materials	SUS316L, PTFE, Elastomer, Magnetic Stainless steel and Fluoro Rubber

The precision is that associated with the full-scale MR and MG number values.
The flow rate precision guaranteed temperatures confirm to Semiconductor standard.
For details, please contact us.