Gas Mass Flow Control and Measurement in Research and Testing Laboratories
SEC-R100 Series
Digital Mass Flow Controller
The digital mass flow controller SEC-R100 focuses on non-semiconductor applications, where high levels of product performance, quality and integrity are needed, such as vacuum coating, bioreactor, food & beverage, analytical, etc.
With this mass flow controller high accuracy (+/-1.0% S.P.) and performance are achieved without the high cost plus the multi gas/multi range function can be used for the nine most popular gases.
Digital (PROFIBUS)/Analog communications and 24 VDC power supply are available.
- Multi Gas / Multi Range*
- User can change gas type and full scale range with free software
- Reduce stock
- Increased flexibility
- High Accuracy ±1.0% S.P.
- ≦1 second response across the full flow rate range
- High performance Solenoid Valve
- O-ring material - Viton™
- Fittings - ¼” Swagelok equivalent
- Digital / Analog communication
- Profibus DP-V0
- Analog 0-5, 0-10 VDC,4-20mA
- 24 V DC power supply
- RoHS compliant
*Gas selection from nine gases
| Model Name | SEC-R116 | SEC-R126 |
|---|---|---|
Full-scale flow rate | < 10LM | < 50LM |
| Compatible gas | N2, O2, Air, H2, He, CH4, C3H8, Ar, CO2 | |
| Flow rate control range | 2-100%F.S. | |
| Accuracy | ±1.0%S.P (Flow rate >30%F.S.)± 0.3%F.S. (Flow rate ≦ 30%F.S.) | |
| Operation temperature | 5 to 50 (recommended temperature range: 15 to 45℃） | |
| Response | ≦ 1second over full flow rate range | |
| Valve type | Normally Closed | |
| Linearity | within +/- 0.5% of F.S. | |
| Repeatability | within +/- 0.2% of F.S. | |
| Power | 24VDC （13 to 32VDC）7.5VA | |
| Digital | Profibus DP-V0 | |
| Analog | 0-5(10)VDC, 4-20mA | |
| Standard fitting | 1/4” Swagelok equivalent | |
| Leak integrity | ≦1×10-10Pa・m3/s | |
| MAX. Operating pressure | 450kPa (G) | |
| Operating differential pressure | 50 to 300kPa (d)＞3LM：100 to 300kPa (d) | 200 to 300kPa (d) |
| Wetted materials | SUS316L, PTFE, Elastomer, Magnetic Stainless steel and Fluoro Rubber | |
The precision is that associated with the full-scale MR and MG number values.
The flow rate precision guaranteed temperatures confirm to Semiconductor standard.
For details, please contact us.
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