SLIA-300

Highly Sensitive Silica Monitor SLIA-300

Highly Sensitive Silica Monitor

Satisfies the customer's demands for measuring the ultra-low density of silica at the finest sensitivity of 0.01 µg/L (0.01 ppb)

The ultra-pure water that is used in the semiconductor production processes can be further purified by using an ion-exchange resin. Capturing the silica that is dissolved from this ion-exchange resin as quickly as possible can control the ultra-pure water quality, which is important during the production processes.
HORIBA Advanced Techno has developed and employed a new "long light path length measurement cell" to enable highly sensitive measurement of ultra-low density silica and also realized a compact desktop model to improve the usability.
With a broad range of standard features such as self-diagnosis and new performance improvements such as high-speed response and high sensitivity, this product provides enhanced support for the pure water processes in the production of semiconductors.

 

Segment: Semiconductor
Division: Wet Process Control
Base product
Manufacturing Company: HORIBA Advanced Techno Co., Ltd.
  • High Sensitivity and High Reproducibility

A long light path of approx. 1 m is secured by applying fiber optic technologies. This realizes high sensitivity that responds to ultra-low density. This product ensures the reproducible accuracy of the full scale ±2% within the range from 0 to 2 µg/L during high-speed 5-minute measurement.

SLIA-300 - 0.01ug

  • Desktop Model Compact Design

The flexible structure of the "long light path length measurement cell" also realizes a revolutionary compact design. This desktop model is available for various installation conditions such as small spaces.   

SLIA-300 - desktop model

  • Reduced Consumption of Reagent to 1/5

To reduce the consumption of reagent to 1/5 of the previous amount, the reaction cell has been improved and separated from the measurement cell. Also, the measurement cell has been changed to a tube type. Employing the "long light path length measurement cell" can reduce the running cost for reagents drastically.

SLIA-300 - low running cists

  • Reduced Consumption of Reagent by More Than Half

Reduced the consumption of not only the reagent but also the sample water. By employing the "long light path length measurement cell," the consumption of expensive pure water (used as sample water) is reduced by 60%. The silica monitor from HORIBA Advanced Techno contributes to reduce the on-site costs.    

  • Self-Diagnosis Function That Monitors for Operation Errors

Performs self-diagnosis for operation errors such as sample water and/or reagent injection, calibration error, temperature monitoring in a cell, and light source error. When an error is found, a warning lamp is lit and a text message is displayed.

  • Automatic Calibration to Realize Superior Maintainability

Zero calibration is always performed automatically to check for transmitted light and to calibrate the turbidity.

  • Up to Six-Point Measurement Allowed (Optional)

Up to six measurement points can be set. A single unit can be used for multi-point measurement.

  • Semi-permanent Light Source Employed: No Replacement Necessary

A monochromatic semiconductor light source, which provides a steady light volume and long life, is employed. It can be used as semi-permanent light source.

 

Long Light Path Length Measurement Cell: Detects 0.01 µg/L at Minimum

The measurement cell has a double structure in which a light permeable fluorocarbon resin tube runs through a stainless steel pipe. The light coming in from one side of the pipe is repeatedly reflected in the pipe due to the difference of the refractive index between the fluorocarbon tube and the ambient air before reaching the other side.
This light transmission mechanism is an application of the optical fiber's high efficiency and low blockage principle, which realizes improved detection sensitivity and high reproducibility. (Patent pending)

SLIA-300 - Long Light Path Length Measurement Cell

This long light path length cell employs a flexible tube structure, enabling a small-footprint design. By storing the long cell of approx. 1 m in a desktop compact body, a small unit that is 1/8 the size of the previous model has been realized.
Also, the tube structure of the cell has a big advantage for reducing running costs: it reduces the consumption of color reagent and sample water to 1/5 and 1/2 of the previous amounts, respectively.

 

ModelSLIA-300
Measurement methodMolybdic blue absorptiometry
Measurement range0 to 2 / 0 to 20 µg/L, or 0 to 5 / 0 to 50 µg/L (please specify when placing an order)
Measurement time5 minutes
Measurement points1 to 6 points (please specify when placing an order)
Reproducibility±2% of full scale
Calibration functionStandard fluid calibration
Compensation functionBlank compensation
Metage line compensation (Specific to each line)
Reagent used· Reagent A: sulfuric acid + ammonium molybdate
· Reagent B: oxalic acid
· Reagent C: L (+) - ascorbic acid
Reagent replacement intervalOne week (according to the recommended period of our company)
Power100 to 240 V AC 50/60 Hz
Max. power consumptionApprox. 600 VA
Installation conditionIndoor, Ambient temperature 10 to 35°C, Humidity 85% or lower
Sample water condition· Water temperature: 15 to 35°C
· Supplied flow rate: 250 to 300 mL/min (must be adjustable)
· Pressure: 0.1 to 0.5 MPa
Outside dimensions580 (W) x 375 (H) x 500 (D) mm
WeightOne-point measurement: approx. 41 kg (plus 1 kg for an additional measurement point)
External I/ODensity output4 to 20 mA DC / 0 to 16 mA DC / 0 to 1 V DC (to be specified at order)
Contact output· Common to all lines:
During measurement, synchronous signals, alarms (batch), heaters, power off, calibration signals 1 and 2, density upper limit warning, or sample water off.
· Specific to each line:
Measurement range, density upper limit warning, or sample water off (the density limit warning or the sample water off batch or respective line alarm should be specified when placing an order. The alarm contents should be also selected when placing the order.)
Contact input· Common to all lines:Calibration start, measurement start, cost-efficient operation, line selection, measurement low range, measurement high range
Serial I/ORS-232C
Applicable standardCE mark, FCC Part 15
OptionSample water heating unit, standard fluid supply unit, reagent blending tools

REQUEST FOR INFORMATION

Do you have any questions or requests? Use this form to contact our specialists.

Related products

Aqualog
MoreAqualog
Water Treatment Plant Analyzer
CM-200A/210A
MoreCM-200A/210A
Ideal for hydrofluoric acid monitoring in semiconductor manufacturing Hydrofluoric Acid Monitor
CS-100 Series
MoreCS-100 Series
Stand-alone Type Chemical Concentration Monitor
CS-131
MoreCS-131
High-speed response and compact chemical solution concentration monitor SC-1 Monitor,
CS-137
MoreCS-137
BHF Concentration Monitor
CS-139E
MoreCS-139E
High-speed response and compact chemical solution concentration monitor TMAH/H2O2 Monitor
CS-150
MoreCS-150
SPM Monitor
CS-153
MoreCS-153
FPM Monitor
CS-153N
MoreCS-153N
HF/HNO3 Monitor
CS-600F
MoreCS-600F
Fiber Optic Type Chemical Concentration Monitor
CS-700
MoreCS-700
High Precision, High Stability Chemical Concentration Monitor
HE-200C
MoreHE-200C
Industrial electric conductivity meter (Four-Wire Analyzer)
HE-200R
MoreHE-200R
Industrial electric resistivity meter (Four-Wire Analyzer)
HE-300C
MoreHE-300C
Industrial electric conductivity meter (Two-Wire Transmitter)
HE-300R
MoreHE-300R
Industrial electric resistivity meter (Two-Wire Transmitter)
HE-480C
MoreHE-480C
Industrial conductivity meter (low concentration type)
HE-480C-GC
MoreHE-480C-GC
Carbon Sensor Conductivity Meter (Low concentration type)
HE-480H
MoreHE-480H
Industrial conductivity meter (high concentration type)
HE-480R(W)
MoreHE-480R(W)
Industrial resistivity meter
HE-960CA
MoreHE-960CA
Citric Acid Monitor
HE-960CW
MoreHE-960CW
2-channel Sanitary Conductivity Meter (Low Concentration type)
HE-960H-KOH
MoreHE-960H-KOH
KOH Monitor
HE-960H-TM
MoreHE-960H-TM
Wide range TMAH Concentration Monitor
HE-960H-TM-S
MoreHE-960H-TM-S
High Precision TMAH Concentration Monitor
HE-960HC
MoreHE-960HC
Carbon Sensor Conductivity Meter (High concentration type)
HE-960LC
MoreHE-960LC
Carbon Sensor Conductivity Meter
HE-960R-GC(W)
MoreHE-960R-GC(W)
Carbon Sensor Resistivity Meter
HE-960RW
MoreHE-960RW
Industrial resistivity meter
HE-960RW-GC(W)
MoreHE-960RW-GC(W)
2-Channel Resistivity Meter
HE-960TM
MoreHE-960TM
TMAH Conductivity Meter. Perfect for Controlling TMAH Developer Concentrations
HE-Z-100T
MoreHE-Z-100T
High Resistivity Meter
HF HD-960L
MoreHF HD-960L
Dissolved Oxygen Monitor in Low Concentration
HF-960EM
MoreHF-960EM
In-line Sensor & Auto Range Switching Concentration Monitor
HF-960H
MoreHF-960H
HF / HCl Concentration Monitor
HF-960M
MoreHF-960M
Low Concentration Type HF/HCl/NH3 Concentration Monitor
HF-SP-CU
MoreHF-SP-CU
2-channel High Precision HF Concentration Monitor
HP-200
MoreHP-200
Industrial pH meter (Four-Wire Analyzer)
HP-300
MoreHP-300
Industrial pH meter (Two-Wire Transmitter)
HP-480(W)
MoreHP-480(W)
Industrial pH meter
HP-480TP
MoreHP-480TP
Industrial pH meter - Industrial time sharing proportional control
HZ-960
MoreHZ-960
Dissolved Ozone Monitor
HZ-960HPO-M
MoreHZ-960HPO-M
H2O2 Monitor
Industrial electric conductivity meter HE-200H (Four-Wire Analyzer)
MoreIndustrial electric conductivity meter HE-200H (Four-Wire Analyzer)
Industrial pH meter - Pulse poportional control HP-480PL
MoreIndustrial pH meter - Pulse poportional control HP-480PL
Industrial pH meter four-point alarm and a time sharing proportional control HP-960FTP
MoreIndustrial pH meter four-point alarm and a time sharing proportional control HP-960FTP
Industrial pH meter HP-480
MoreIndustrial pH meter HP-480
Industrial residual chlorine meter HR-480 (The Slim48 series)
MoreIndustrial residual chlorine meter HR-480 (The Slim48 series)
Industrial resistivity meter HE-480R
MoreIndustrial resistivity meter HE-480R
LAQUA DS-72
MoreLAQUA DS-72
Benchtop Water Quality Meters
LAQUA EC1100
MoreLAQUA EC1100
Benchtop Water Quality Meters
LAQUA F-72
MoreLAQUA F-72
Benchtop Water Quality Meters
LAQUA F-73
MoreLAQUA F-73
Benchtop Water Quality Meters
LAQUA F-74
MoreLAQUA F-74
Benchtop Water Quality Meters
LAQUA PC1100
MoreLAQUA PC1100
Benchtop Water Quality Meters
LAQUA PH1100
MoreLAQUA PH1100
Benchtop Water Quality Meters
LAQUA PH1200
MoreLAQUA PH1200
Benchtop Water Quality Meters
LAQUA PH1300
MoreLAQUA PH1300
Benchtop Water Quality Meters
LAQUAact DO110
MoreLAQUAact DO110
Handheld Water Quality Meters
LAQUAact DO120
MoreLAQUAact DO120
Handheld Water Quality Meters
LAQUAact EC110
MoreLAQUAact EC110
Handheld Water Quality Meters
Aqualog
MoreAqualog
Water Treatment Plant Analyzer
Aqualog Datastream
MoreAqualog Datastream
For Instant Water Quality Reports
CS-100 Series
MoreCS-100 Series
Stand-alone Type Chemical Concentration Monitor
CS-131
MoreCS-131
High-speed response and compact chemical solution concentration monitor SC-1 Monitor,
CS-137
MoreCS-137
BHF Concentration Monitor
CS-139E
MoreCS-139E
High-speed response and compact chemical solution concentration monitor TMAH/H2O2 Monitor
CS-150
MoreCS-150
SPM Monitor
CS-153
MoreCS-153
FPM Monitor
CS-153N
MoreCS-153N
HF/HNO3 Monitor
CS-600F
MoreCS-600F
Fiber Optic Type Chemical Concentration Monitor
CS-700
MoreCS-700
High Precision, High Stability Chemical Concentration Monitor
Gratings - OEM Diffraction Grating
MoreGratings - OEM Diffraction Grating
OEM gratings design and production capabilities
HC-200NH
MoreHC-200NH
Ammonia Nitrogen Meter
HE-480C-GC
MoreHE-480C-GC
Carbon Sensor Conductivity Meter (Low concentration type)
HE-960CA
MoreHE-960CA
Citric Acid Monitor
HE-960H-KOH
MoreHE-960H-KOH
KOH Monitor
HE-960H-TM
MoreHE-960H-TM
Wide range TMAH Concentration Monitor
HE-960H-TM-S
MoreHE-960H-TM-S
High Precision TMAH Concentration Monitor
HE-960HC
MoreHE-960HC
Carbon Sensor Conductivity Meter (High concentration type)
HE-960LC
MoreHE-960LC
Carbon Sensor Conductivity Meter
HE-960R-GC(W)
MoreHE-960R-GC(W)
Carbon Sensor Resistivity Meter
HE-960RW-GC(W)
MoreHE-960RW-GC(W)
2-Channel Resistivity Meter
HE-960TM
MoreHE-960TM
TMAH Conductivity Meter. Perfect for Controlling TMAH Developer Concentrations
HE-Z-100T
MoreHE-Z-100T
High Resistivity Meter
HF HD-960L
MoreHF HD-960L
Dissolved Oxygen Monitor in Low Concentration
HF-960EM
MoreHF-960EM
In-line Sensor & Auto Range Switching Concentration Monitor
HF-960H
MoreHF-960H
HF / HCl Concentration Monitor
HF-960M
MoreHF-960M
Low Concentration Type HF/HCl/NH3 Concentration Monitor
HF-SP-CU
MoreHF-SP-CU
2-channel High Precision HF Concentration Monitor
HT-110
MoreHT-110
Pharmaceutical Total Organic Carbon Monitor - Online TOC-Analyzer
HZ-960
MoreHZ-960
Dissolved Ozone Monitor
HZ-960HPO-M
MoreHZ-960HPO-M
H2O2 Monitor
ICP Neo
MoreICP Neo
ICP Software
Inductively Coupled Plasma Optical Emission Spectrometer - Made to Measure - Customized
MoreInductively Coupled Plasma Optical Emission Spectrometer - Made to Measure - Customized
For your specific application
Industrial simplified fluoride ion concentration meter HC-200F (Four-Wire Analyzer)
MoreIndustrial simplified fluoride ion concentration meter HC-200F (Four-Wire Analyzer)
Industrial simplified fluoride ion concentration meter HC-300F (Two-Wire Transmitter)
MoreIndustrial simplified fluoride ion concentration meter HC-300F (Two-Wire Transmitter)
LAQUA F-72
MoreLAQUA F-72
Benchtop Water Quality Meters
LAQUA F-73
MoreLAQUA F-73
Benchtop Water Quality Meters
LAQUA F-74
MoreLAQUA F-74
Benchtop Water Quality Meters
LAQUA PH1300
MoreLAQUA PH1300
Benchtop Water Quality Meters
LAQUAact PH130
MoreLAQUAact PH130
Handheld Water Quality Meters
LAQUAtwin Ca-11
MoreLAQUAtwin Ca-11
Pocket Water Quality Meters
LAQUAtwin K-11
MoreLAQUAtwin K-11
Pocket Water Quality Meters
LAQUAtwin Na-11
MoreLAQUAtwin Na-11
Pocket Water Quality Meters
LAQUAtwin NO3-11C/NO3-11S/NO3-11
MoreLAQUAtwin NO3-11C/NO3-11S/NO3-11
Pocket Water Quality Meters
LAQUAtwin pH-11
MoreLAQUAtwin pH-11
Pocket Water Quality Meters
LAQUAtwin pH-22
MoreLAQUAtwin pH-22
Pocket Water Quality Meters
LAQUAtwin pH-33
MoreLAQUAtwin pH-33
Pocket Water Quality Meters
Organic Pollutant Monitor OPSA-150
MoreOrganic Pollutant Monitor OPSA-150
SC-2 Concentration Monitor, CS-152
MoreSC-2 Concentration Monitor, CS-152
Semiconductor process monitoring for SC-2 process
TPNA-500
MoreTPNA-500
Automatic Total Nitrogen/Phosphorus Monitoring
Ultima Expert LT
MoreUltima Expert LT
Affordable high performance ICP-OES
UP-100
MoreUP-100
Micro Volume pH Monitor
Water Quality Meter with HART communication HQ-300
MoreWater Quality Meter with HART communication HQ-300
CODA-500
MoreCODA-500
Automatic COD Monitor
TPNA-500
MoreTPNA-500
Automatic Total Nitrogen/Phosphorus Monitoring