SPM Monitor CS-150

CS-100 Seriesr, CS-137-153-152-150-100-153N-139E

The CS-150 is a high-precision chemical concentration monitor designed for use with the SPM solutions used in semiconductor-manufacturing cleaning processes. Featuring fast response and a compact size, the CS-150 continually monitors the concentrations of the various components of the SPM solutions (H2SO4/H2O2/H2O) used to remove metal ions and organic substances. Feedback control based on the monitor output is used to keep the concentrations of the SPM solutions within the allowable ranges and to eliminate unnecessary replacement of chemicals.
A short measuring cycle allows the accurate tracking of chemical concentrations, while the compact design facilitates integration with a cleaning device.
 

 

Segment: Semiconductor
Division: Wet Process Control
Base product
Manufacturing Company: HORIBA Advanced Techno Co. Ltd.
  • Short 3-second measurement cycle supports concentration control for 300-mm processes
    The short measurement cycle of approximately three seconds makes it possible to track concentrations very close to real time. Supports fine-tuned concentration control for batch-type-bath as well as single-bath cleaning devices.
  • Compact design helps reduce cleaning-device footprint for easy integration.
    The compact design reduces the monitor's footprint by about a third*, thus reducing the amount of space required in the cleaning device.
    *Based on comparison with the HORIBA CS-340 series.
  • Reduces lot defects in the cleaning process for improved yield
    Output from the monitor is used for automated spiking control of the SPM solutions, enabling cleaning with a high reproducibility rate. As a result, lot defects decrease in the cleaning process, which helps to boost the overall yield.
  • Fully automatic measurement and simple controlMeasurement is fully automatic once the unit has been installed and the measurement cycle has been started.  Air is used for reference spectral measurement, removing the need for a utility water supply.
  • Comprehensive measures to eliminate air bubbles enable continuous measurement.
    A built-in bubble removal function removes air bubbles immediately before the flow cell, allowing continuous measurement of the solution as it is flowing.
  • The monitor uses a low-voltage (24 V DC), with a load of approximately 45 W it is energy efficiency. An internal leakage sensor is also installed to detect solution leaks, so that the supply of SPM solutions can be shut off in the event of an emergency.

 

Sample configuration:

SPM Monitor CS-150 - Sample configuration

 

 

Specification Attribute

 

Specification Value

 
    

Model

CS-150

CS-150C

Model specifications

No cooling unit

Integrated cooling unit

Measurement sample

SPM (Sulfuric acid/Hydrogen peroxide aqueous solution)

Measurement principle

Absorption spectrometry

Concentration computation principle

Temperature-compensated multivariate analysis

Measurement range

H2SO4: 50.0 to 90.0 %

H2O2: 0.00 to 10.00 %

H2O: 0.0 to 50.0 %

Reproducibility

H2SO4: ±0.5 %

(Peak to peak)

H2O2: ±0.50 %

H2O: ±1.5 %

 

Chemical conditions

Temperature

20 to 30 °C

20 to 60 °C

 

Flow rate

20 to 60 ml/min.

20 to 40 ml/min.

 

Pressure

0.10 to 0.20 MPa

Measurement cycle

Approx. 3 seconds minimum

Equipment temperature

20 to 25 °C

Operation panel

1)Temperature level display:

Sulfuric acid, Hydrogen peroxide, Water

2)Alarm display (Sulfuric acid, Hydrogen peroxide):

Concentration low-low limit, Concentration low limit,

Concentration high limit, Concentration high-high limit

3)Alarm value settings (Sulfuric acid, Hydrogen peroxide):

Concentration low-low limit, Concentration low limit,

Concentration high limit, Concentration high-high limit

Serial input/output

RS-232C

1)Concentration data:

Sulfuric acid, Hydrogen peroxide, Water

2)Alarm value settings (Sulfuric acid, Hydrogen peroxide):

Concentration low-low limit, Concentration low limit,

Concentration high limit, Concentration high-high limit

Parallel input

12 to 30 V DC (photocoupler insulated)

Parallel concentration alarm (ON/OFF)

Parallel output

Maximum current when open collector output is ON:

5 mA

Maximum voltage when open collector output is OFF:

30 V

1)Alarm output: Sulfuric acid, Hydrogen peroxide:

Concentration low-low limit, Concentration low limit,

Concentration high limit, Concentration high-high limit

2)Device error (including liquid leakage)

3)Under measurement

 

Analog output

4 to 20 mA

(2 outputs: H2SO4: 50.0 to 100.0 %/H2O: 0.00 to 10.00 %)

The analog output can be prepared to correspond to each

requirement by users. (Please specify when ordering.)

Power

24 V DC ±10%, 2 A

Dimensions

205 (W) x 329 (D) x 269 (H) mm

8.1 (W) x 13 (D) x 10.6 (H) in

291 (W) x 329 (D) x 269 (H) mm

11.5 (W) x 13 (D) x 10.6 (H) in

Mass

Approx. 11 kg

Approx. 12 kg

Connection pipe size

For inlet and outlet: Outer diameter 6 mm (inner diameter 4 mm)

Pipe connection

Nippon Pillar Super type

Chemical Concentration Monitoring in Wet Process in Semiconductor Manufacturing Process
Chemical Concentration Monitoring in Wet Process in Semiconductor Manufacturing Process

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