UR-Z700 series

Digital Automatic Pressure Regulator UR-Z700 series

Digital Automatic Pressure Regulator

The high performance auto pressure regulator UR-Z700 Series has electronic regulators with high-precision pressure sensors and high resolution, fast response piezo actuator valves. They control the pressure relative to the external control signal that they receive. For both Digital/Analog and DeviceNet™ communications.

 

Segment: Semiconductor
Division: Fluid Control
Manufacturing Company: HORIBA STEC, Co., Ltd.

Benefits: 

  • Eliminates the effects of cross talk caused by the switching of high flow lines
  • Fast response: within 0.5 seconds
  • Flexible design: these regulators can be mounted in any position or attitude, and because they use an electric signal for control they are suitable for a wide variety of gas supply systems
  • Line-up of Inlet control type (-B type), Outlet control type
  • Choose between gauge pressure type or absolute pressure type
  • RoHS compliant (UR-Z704 series)
  • Ultra clean: all metal construction (M type).

 

 

External Dimension

Dimension of Digital Automatic Pressure Regulator UR-Z700 series

 

 

 

Process Control and In-situ Measurement for Photovoltaic Manufacturing Process
Process Control and In-situ Measurement for Photovoltaic Manufacturing Process

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