UR-Z700 series

Digital Automatic Pressure Regulator UR-Z700 series

Digital Automatic Pressure Regulator

The high performance auto pressure regulator UR-Z700 Series has electronic regulators with high-precision pressure sensors and high resolution, fast response piezo actuator valves. They control the pressure relative to the external control signal that they receive. For both Digital/Analog and DeviceNet™ communications.

 

Segment: Semiconductor
Division: Fluid Control
Base product
Manufacturing Company: HORIBA STEC, Co., Ltd.

Benefits: 

  • Eliminates the effects of cross talk caused by the switching of high flow lines
  • Fast response: within 0.5 seconds
  • Flexible design: these regulators can be mounted in any position or attitude, and because they use an electric signal for control they are suitable for a wide variety of gas supply systems
  • Line-up of Inlet control type (-B type), Outlet control type
  • Choose between gauge pressure type or absolute pressure type
  • RoHS compliant (UR-Z704 series)
  • Ultra clean: all metal construction (M type).

 

 

External Dimension

Dimension of Digital Automatic Pressure Regulator UR-Z700 series

 

 

 

Process Control and In-situ Measurement for Photovoltaic Manufacturing Process
Process Control and In-situ Measurement for Photovoltaic Manufacturing Process
Specifications of analog communication model
CategoryDocuments
Size 0.04 MB
FiletypePDF
Specifications of Devicenet TM communication model
CategoryDocuments
Size 0.03 MB
FiletypePDF

REQUEST FOR INFORMATION

Do you have any questions or requests? Use this form to contact our specialists.

Product accessories

Control unit PE-D20
MoreControl unit PE-D20
Conversion adapters CA series
MoreConversion adapters CA series
Dedicated power sources PE Series
MoreDedicated power sources PE Series
Display unit DU series
MoreDisplay unit DU series
Monitor unit PE-D10
MoreMonitor unit PE-D10
PE-S7
MorePE-S7
Signal cables and conversion adapters SC series
MoreSignal cables and conversion adapters SC series
SU-503ED/502EA
MoreSU-503ED/502EA

Related products

EC-5000 Series
MoreEC-5000 Series
Exhaust Pressure Controller
EV-140C
MoreEV-140C
Optical Emission Spectroscopy Etching End-point Monitor
FDM Series
MoreFDM Series
POCl3 Auto Refill System
LF-F/LV-F Series
MoreLF-F/LV-F Series
Digital Liquid Mass Flow Meters / Controllers
LSC series
MoreLSC series
Compact Baking System
LU Series
MoreLU Series
Liquid Auto Refill System
MI-1000/MV-1000
MoreMI-1000/MV-1000
Mixed Injection System Liquid Vaporizers
MICROPOLE System
MoreMICROPOLE System
Compact Process Gas Monitor
MV-2000 Series
MoreMV-2000 Series
Mixed Injection System Liquid Vaporizer
PV Series
MorePV Series
Piezo Actuator Valve
SEC-8000 F/D/E Series
MoreSEC-8000 F/D/E Series
High Temperature Digital Mass Flow Controller
SEC-N100 Series
MoreSEC-N100 Series
Digital Mass Flow Controller
SEC-Z500X
MoreSEC-Z500X
Multi Range/Multi Gas Digital Mass Flow Controller
VC Series
MoreVC Series
Direct Liquid Injection System
EC-5000 Series
MoreEC-5000 Series
Exhaust Pressure Controller
GR-300 Series
MoreGR-300 Series
Wafer Back Side Cooling System
PV Series
MorePV Series
Piezo Actuator Valve
VG Series
MoreVG Series
Capacitance Manometer