Vacuum Spectrometer - TGS300


Toroidal Grating Spectrograph, coming from Synchrotron technologies

Based on a toroïdal grating design, the TGS (Toroïdal Grating Spectrograph) series are compact flat field spectrographs. In this design, the grating is fixed, which allows achieving a very good stability and compactness. Detector slides over the 40 mm exit flat field of the spectrograph. With a choice of three gratings (both master and replica) the TGS series covers a large VUV range from 9.5 to 170 nm.

The TGS300 is offered as standard, other models can be available upon request.


Segment: Scientific
Division: Custom Spectroscopy Solutions
Base product
Manufacturing Company: HORIBA France SAS

•    Single Toroïdal Grating design
•    Choice of three gratings
•    Low astigmatism level
•    Fixed grating position
•     CCD flange adjustable in exit focal plane
•     Choice of master or replica gratings
•     Kinematic grating mount or two gratings slider
•     Compact design 
•    High Vacuum compatible



  • Optimized for throughput
  • Optimized spectral range and resolution
  • 40 mm Flat field spectrograph
  • Robust
  • In vacuum focus and central wavelength adjustment
  • Optimize damage threshold or cost
  • Interchangeable gratings 
  • Less room consuming and easy to install
  • 5 10-6 mbar) - Optional UHV operation (5 10-9 mbar)


Optical design

Toroïdal VLS Grating (fixed single optic)

Focal length

300 mm




2105 gr/mm : 9.5-32 nm

450 gr/mm : 10-110 nm

290 gr/mm : 15.5-170 nm

Optic coating

Pt or Au

Deviation angle



2105 gr/mm : 0.5 nm/mm at 9.5 nm

450 gr/mm : 2.3 nm/mm at 10 nm

290 gr/mm : 3.5 nm/mm at 15.5 nm


5 10-6 mbar (HV version)

5 10-9 mbar (UHV version)

Pumping flange


Entrance port

Micrometric slits (10 µm to 2 mm)

Entrance flange

DN40 KF (DN40 CF)

Exit port

Adjustable CCD port

Exit flangeDN100 CF
TGS 300 Toroidal Grating Spectrograph Brochure
Size 1.62 MB


Do you have any questions or requests? Use this form to contact our specialists.

Product accessories

Sample chamber for VUV system
MoreSample chamber for VUV system
Accessory for transmission and reflection measurements
Source: Deuterium Lamp for VUV systems
MoreSource: Deuterium Lamp for VUV systems
For radiation down to 115nm

Related products

CC-55 Imaging Spectrometer
MoreCC-55 Imaging Spectrometer
Dual Mode Analog/Photon Counting PMT
CP20 Series
MoreCP20 Series
OEM miniature spectrograph
Optical Emission Spectroscopy Etching End-point Monitor
GD-Profiler 2™
MoreGD-Profiler 2™
Discover a Whole New World of Information with Glow Discharge Optical Emission Spectrometer
Gemini 180
MoreGemini 180
Double monochromator
Gratings - Laser Pulse Compression Gratings
MoreGratings - Laser Pulse Compression Gratings
Pulse compression gratings using holographic techniques
Gratings - OEM Diffraction Grating
MoreGratings - OEM Diffraction Grating
OEM gratings design and production capabilities
Gratings for astronomy
MoreGratings for astronomy
Gratings for Space-Flight
MoreGratings for Space-Flight
Space qualified and TRL9
Gratings for Synchrotron, FEL and EUV light sources
MoreGratings for Synchrotron, FEL and EUV light sources
Holographic Lamellar Gratings
OEM Imaging Scanning Spectrometer/Monochromator
Vacuum Spectrometer: A Compact Monochromator for the 100-600 nm region
Vacuum Spectrometer: Monograph for far and extreme ultraviolet
iHR Series
MoreiHR Series
Mid-Focal Length Imaging Spectrometers
High Sensitivity Imaging Spectrograph
MicroHR Series
MoreMicroHR Series
Short Focal Length Imaging Spectrometers
Mini CCT Plus
MoreMini CCT Plus
Mini Raman Spectrometer
Pentra C200
MorePentra C200
Reliabilty and accuracy
Pentra C400
MorePentra C400
From routine to specific tests, perform them all on a single system.
Plasma Emission Controller
Scopelite 200
MoreScopelite 200
Microscope Illumination System
Spectrometers - CP140 - Imaging Spectrograph
MoreSpectrometers - CP140 - Imaging Spectrograph
Spectrometers - LIBS spectrometers
MoreSpectrometers - LIBS spectrometers
Laser-induced Breakdown Spectroscopy (LIBS)
Spectrometers - Miniature High Throughput Spectrometer (VS20)
MoreSpectrometers - Miniature High Throughput Spectrometer (VS20)
Spectrometers - Multi-channel spectrometers
MoreSpectrometers - Multi-channel spectrometers
Spectrometers - OEM Miniature-Raman Spectrographs
MoreSpectrometers - OEM Miniature-Raman Spectrographs
Complete Range of Miniature Raman Systems and Components for OEM
Spectroscopy Solutions - Deep Cooled UV/Vis/NIR Scientific Cameras
MoreSpectroscopy Solutions - Deep Cooled UV/Vis/NIR Scientific Cameras
TE and cryogenically cooled CCD and EMCCD scientific cameras for ultra sensitivity from 200 nm to 1100 nm
Spectroscopy Solutions - Deep Cooled Vacuum Ultra Violet Scientific Cameras – Syncerity VUV
MoreSpectroscopy Solutions - Deep Cooled Vacuum Ultra Violet Scientific Cameras – Syncerity VUV
High energy camera detection that can interface with a vacuum chamber for measurement down to 120 nm
Spectroscopy Solutions - High Resolution Monochromators- FHR Series
MoreSpectroscopy Solutions - High Resolution Monochromators- FHR Series
640 and 1000 mm focal length high resolution spectrometers
Spectroscopy Solutions - Long Focal Length Spectrometer – 1000M
MoreSpectroscopy Solutions - Long Focal Length Spectrometer – 1000M
The ultimate spectrometer for ultra-high spectral resolution down to 0.006 nm
Spectroscopy Solutions - Microscope Photomultiplier Photometers
MoreSpectroscopy Solutions - Microscope Photomultiplier Photometers
Ideal for Electrophysiology researchers to quantitate light intensity out of a microscope
Spectroscopy Solutions - Photon Counting PMT Detection System
MoreSpectroscopy Solutions - Photon Counting PMT Detection System
Self contained PMT housing for quantitative spectroscopy and imaging low light measurements
Spectroscopy Solutions - Short Focal Length Triple Grating Imaging Spectrographs – Triax Series
MoreSpectroscopy Solutions - Short Focal Length Triple Grating Imaging Spectrographs – Triax Series
Affordable 190 nm focal length imaging spectrometers offering maximum versatility and automation
Spectroscopy Solutions - Single Channel Detectors
MoreSpectroscopy Solutions - Single Channel Detectors
Large choice of PMTs, solid state, photoelectric detectors for custom spectroscopy solutions
Spectroscopy Solutions - Software
MoreSpectroscopy Solutions - Software
Software Control and Data Acquisition
UV Plasma sources
MoreUV Plasma sources
Vacuum Spectrometer - Custom Monochromators
MoreVacuum Spectrometer - Custom Monochromators
Vacuum monochromator to answer specific request
Vacuum Spectrometer - PGM1000
MoreVacuum Spectrometer - PGM1000
Monograph to explore the 1- 125 nm
Vacuum Spectrometer - PGM200
MoreVacuum Spectrometer - PGM200
Plane Grating Monographs
Vacuum Spectrometer - TGM1200
MoreVacuum Spectrometer - TGM1200
Monochromator with 1000 mm focal length to cover the 12.5-400 nm spectral range.
Vacuum Spectrometer - TGM1900
MoreVacuum Spectrometer - TGM1900
Monochromator with 1146 mm focal length to cover the 8-128 nm spectral range.
Vacuum Spectrometer - TGM300
MoreVacuum Spectrometer - TGM300
Monochromator with 300 mm focal length to cover the 10-300 nm spectral range
Vacuum Spectrometer - VHR Series
MoreVacuum Spectrometer - VHR Series
Vacuum High Resolution monochromators for the 100-1500 nm region
Vacuum System - VUV Fluorescence
MoreVacuum System - VUV Fluorescence
Fluorescence instrument based on H20-UVL and iHR320
Vacuum System - VUV Reflectance
MoreVacuum System - VUV Reflectance
Vacuum System - VUV Transmission
MoreVacuum System - VUV Transmission
Use of H20UVL for VUV transmission
VS7000 Dual & Quad
MoreVS7000 Dual & Quad
DUAL & QUAD CCD Mini-Spectrometer
High Dynamic Range Mini-Spectrometer
High Speed Miniature CCD Spectrometer
Highest SNR CMOS Mini-Spectrometer