Process Control and In-situ Measurement for Photovoltaic Manufacturing Process
VC Series
Direct Liquid Injection System
The VC Series is able to rapidly vaporize pure water or other liquid sources without carrier gas, which enables you to construct a more compact vaporization system.
HORIBA can provide you with a custom-made vaporization system consisting of this VC Series and all the other components you need:
- A liquid mass flow meter for flow rate measurement,
- A high temperature mass flow controller for measurement of vapor flow rate,
- Valves, filters, heaters, etc.
- Compact size
- Can be installed in a variety of positions
- Best-selling TEOS vaporization system models
- Combines SEF or LF, and digital control is possible
- No need for a special bubbling tank or vaporization tank
- Line-up of DeviceNetTM model
- RoHS Compliance.
Model | VC-1420 |
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Flow rate generated*1 (During TEOS generation) | Max. 5.0 CCM conversion (liquid phase conversion) |
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Liquids supported | TEOS, P(OCH3)3, C6F6 | ||
Temperature rise | Max. 150°C | ||
Pressure generated*1 | Reduced pressure | ||
External leak integrity | 1.0x10-8Pa·m3/s | ||
Internal Leak Integrity | 1.0x10-6Pa·m3/s | ||
Wetted mateliar | 316L Stainless Steel ( polished surface ) | ||
Internal heater volume | AC 100V to 120V 70W(35Wx2) | ||
Temperature sensor used | Thermocouple K type (CA) | ||
Pressure Resistance | 1.0MPa（G） | ||
Standard Fitting | Liquid inlet: 1/8 inch VCR type male Gas outlet: 1/4 inch VCR type female |
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*1 Varies depending on the type of liquid. |
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*CCM is a symbol indicating gas flow rate (mL/min at 25°C, 101.3 kPa). | |||
External Dimension
Liquid Source Vaporization and Supply in Research and Testing Laboratories
Optical Fiber Manufacturing Process in Electrical Equipment
