The VC Series is able to rapidly vaporize pure water or other liquid sources without carrier gas, which enables you to construct a more compact vaporization system.
HORIBA can provide you with a custom-made vaporization system consisting of this VC Series and all the other components you need:
Model | VC-1420 |
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Flow rate generated*1 (During TEOS generation) | Max. 5.0 CCM conversion (liquid phase conversion) |
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Liquids supported | TEOS, P(OCH3)3, C6F6 | ||
Temperature rise | Max. 150°C | ||
Pressure generated*1 | Reduced pressure | ||
External leak integrity | 1.0x10-8Pa·m3/s | ||
Internal Leak Integrity | 1.0x10-6Pa·m3/s | ||
Wetted mateliar | 316L Stainless Steel ( polished surface ) | ||
Internal heater volume | AC 100V to 120V 70W(35Wx2) | ||
Temperature sensor used | Thermocouple K type (CA) | ||
Pressure Resistance | 1.0MPa（G） | ||
Standard Fitting | Liquid inlet: 1/8 inch VCR type male Gas outlet: 1/4 inch VCR type female |
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*1 Varies depending on the type of liquid. |
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*CCM is a symbol indicating gas flow rate (mL/min at 25°C, 101.3 kPa). | |||
External Dimension
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