discontinued This product has been discontinued and is no longer available. You can still access this page for informational service purposes.

VHR Series

Vacuum Spectrometer - Vacuum High Resolution monochromators for the 100-1500 nm region

The VHR spectrometers series are the Far UV version of our famous FHR series. Especially designed with an optical cavity which keeps pressure up to 10-5 mbar, the VHR series can extend spectral measurements down to 100 nm and up to MIR (15 µm) with optimal performances. As our FHR, the VHR series offer a unique combination of drive speed, precision and high resolution, completely revolutionizing the large spectrometer market.

 

Segment: Scientific
Manufacturing Company: HORIBA France SAS
 VHR640VHR1000

Optical design

Czerny Turner

Focal length640 mm1000 mm
Aperturef/5.4f/9
GratingsUp to 4320 gr/mm availableUp to 4320 gr/mm available
Optic coatingAu, Pt or MgF2 optimized at 121 nm
Spectral RangeFrom 100nm to 15 µm depending on selected grating(s)
Dispersion0.37 nm/mm with 3600 gr/mm0.25 nm/mm with 3600 gr/mm
DriveFast worm drive
Resolution.008nm*0.005nm*
VacuumFew 10-5 mbar (HV)
Pumping flangeDN63 LF
Entrance portMicrometric slits (10 µm to 2 mm)
Exit portsMicrometric slits (10 µm to 2 mm) or Adjustable CCD port
Entrance flangeDN40 KF
Exit flangeDN40 KF for slit port
DN63CF for CCD port
PC interfaceUSB2

*with 3600gr/mm grating, slits at 10 µm x 2 mm

Request for Information

Do you have any questions or requests? Use this form to contact our specialists.

* These fields are mandatory.

Related products

1000M Series
1000M Series

Long Focal Length Spectrometer

Blazed holographic plane gratings
Blazed holographic plane gratings

OEM gratings design and production capabilities

CP20 Series
CP20 Series

OEM miniature spectrograph

DeltaRAM X
DeltaRAM X

Random Access Monochromator

EV 2.0 Series
EV 2.0 Series

Endpoint / Chamber Health Monitor based on Optical Emission Spectroscopy and MWL Interferometry

EV-140C
EV-140C

Optical Emission Spectroscopy Etching End-point Monitor

FHR Series
FHR Series

High Resolution Monochromators

Flat field and imaging gratings - Type IV
Flat field and imaging gratings - Type IV

OEM gratings design and production capabilities

GD-Profiler 2™
GD-Profiler 2™

Discover a Whole New World of Information with Glow Discharge Optical Emission Spectrometer

Gemini 180
Gemini 180

Double monochromator

Gratings - Laser Pulse Compression Gratings
Gratings - Laser Pulse Compression Gratings

Pulse compression gratings using holographic techniques

Gratings for Space-Flight
Gratings for Space-Flight

Space qualified and TRL9

Holographic concave gratings - Type I
Holographic concave gratings - Type I

OEM gratings design and production capabilities

Holographic plane gratings
Holographic plane gratings

OEM gratings design and production capabilities

iHR Series
iHR Series

Mid-Focal Length Imaging Spectrometers

LEM Series
LEM Series

Camera Endpoint Monitor based on Real Time Laser Interferometry

LSH Illuminator
LSH Illuminator

Compact Deuterium, Tungsten Halogen or Glow Bar Light Source

Lumetta compact spectrograph
Lumetta compact spectrograph

High Sensitivity Imaging Spectrograph

MicroHR Series
MicroHR Series

Short Focal Length Imaging Spectrometers

Mini CCT Plus
Mini CCT Plus

Mini Raman Spectrometer

Monochromator gratings - Type IV
Monochromator gratings - Type IV

OEM gratings design and production capabilities

Pentra C200
Pentra C200

Clinical Chemistry Analyzer

Pentra C400
Pentra C400

Clinical Chemistry Analyzer

PoliSpectra® VS70 Dual & Quad
PoliSpectra® VS70 Dual & Quad

DUAL & QUAD CCD Mini-Spectrometer

PowerArc
PowerArc

Broadband Xe Light Source

RU-1000
RU-1000

Plasma Emission Controller

Ruled plane gratings
Ruled plane gratings

OEM gratings design and production capabilities

Spectrometers - LIBS spectrometers
Spectrometers - LIBS spectrometers

Laser-induced Breakdown Spectroscopy (LIBS)

Tunable PowerArc
Tunable PowerArc

Tunable 75W Xe Light Source

Yumizen C230
Yumizen C230

Clinical Chemistry Analyzer

Yumizen C240
Yumizen C240

Clinical Chemistry Analyzer

Yumizen C560
Yumizen C560

Clinical Chemistry Analyzer