VS70-MC

VS70-MC
VS70-MC Spectral Coverage

Miniature Multi Communication UV-NIR Spectrometer

VS70-MC (Multi Communication) is a high performance compact fiber coupled spectrometer system covering wide spectral range of 200 to 910 nm.

This OEM optical module is built around HORIBA’s type-IV Aberration-Corrected Flat-Field Holographic Ion-Etched concave grating and is specially designed to easily adapt to a large variety of detectors and electronic drivers. This system is fitted with an integrated order-sorting filter to eliminate higher orders.

The proprietary layout of the VS70-MC features a single-optics design for superior imaging, peak symmetry, flat spectral response, high resolution, high sensitivity and low-stray light performance. This system is very well suited for life sciences and semiconductor industry applications such as OES, reflectometry and quality control.

For OEM Industrial Applications

Ideal for UV-NIR industrial applications such as Optical Emission Spectrometry, Fluorescence, Absorbance and Reflectometry
Examples:

  • Semiconductor (Plasma Monitoring and Wafer Inspection)
  • Life Sciences
  • Process and Quality Control

 

*Available in select countries.

You can email OEM Technical Sales at: OEM.US@horiba.com or contact OEM at: +1.732.494.8660 Ext. 7733

Segment: Scientific
Division: OEM
Manufacturing Company: HORIBA Scientific
  • Triple communication capability USB 2, Ethernet and EtherCAT
  • High spectral resolution and system throughput 
  • Uniform Spectral Response
  • Extended spectral coverage with high sensitivity from UV to NIR
  • High SNR and wide dynamic range
  • Enhanced Visual Design
  • One stage TE cooling option available

 

OEM Spectrometer Selection Guide

View and Download our OEM Spectrometer Selection Guide

You can email OEM Technical Sales at: OEM.US@horiba.com or contact OEM at: +1.732.494.8660 Ext. 7733

 

General Spectrometer Specifications*

Spectral Coverage

200 - 910 nm

Spectrometer Input

Fiber coupled: FC or SMA; other options available upon request.

Spectral Resolution

< 2 nm
Average Spectral
Dispersion
25.2 nm/mm

Focal Length

70 mm

OptionsSelection of high grade sensors: CMOS, B.I. CCD, PDA
Input port: SMA, FC, free space, custom input

F/#

F/2.3

Stray-light Rejection
Typical (Maximum)
≤ 0.4% at all applicable wavelengths by design
Measured from 200 nm to 450 nm with a 550OG Schott Glass Filter and a tungsten
broadband source

Wavelength Accuracy

≤ 0.4 nm (Average Absolute Wavelength Error)

Software**

LabVIEW™ acquisition software for initial evaluation (DLLs provided for software integration)

 

Detector Options and Specifications*
Linear back-illuminated CCD with large active area and high sensitivity
Detector ModelHamamatsu CCD sensor S11071 with high
spectral acquisition speed
Cooled Hamamatsu CCD sensor S11851 with
high spectral acquisition speed
Sensor Format2048 x 70 pixels, shorter version available on
request
 
CCD Pixel Size14 x 14 μm14 x 14 μm
CCD Active Area28.7 x 1 mm28.7 x 1 mm
CCD QE> 75% for 450-700 nm> 75% for 450-700 nm
Sensor TemperatureUncooledCooled (stabilized at 5°C)
Maximum Spectral Rate770 spectra/s770 spectra/s
Full Well Capacity> 235,000 e¯ (typical); >200,000 e¯(minimum)> 235,000 e¯ (typical); >200,000 e¯(minimum)
Readout Noise30 e- (typical); 35 e- (maximum)30 e- (typical); 35 e- (maximum)
Digitization16-bit16-bit
Dynamic Range (FW/RN)7,800:1 (typical)7,800:1 (typical)
SNR≥ 447:1 (Typical = 485:1)≥ 447:1 (Typical = 485:1)
Non-linearity (measured
on each system)
< 0.4% (corrected)< 0.4% (corrected)
Dark current @ (25°C)50 e-/pix/s (typical); 500 e-/pix/s (maximum)7 e-/pix/s (typical); 70 e-/pix/s (maximum)
Communication
Triger Capability
(In and Out)
Single mode: Ethernet/EtherCAT/USB 2.0
Dual mode: Ethernet & EtherCAT simultaneous
Single mode: Ethernet/EtherCAT/USB 2.0
Dual mode: Ethernet & EtherCAT simultaneous
Environmental ConditionsOperating temperature 15°C to 40°C ambient
Relative humidity <70% (non-condensing)
Storage temperature -25°C to 45°C
Power Requirements24VDC Power
Kycon 9-PIN DB9 Connector

* HORIBA Instruments has a policy of continuous product development, and reserves the right to amend part numbers, descriptions and
specifications without prior notice.
**No LabVIEW™ license is needed to run our acquisition software.

 

Quantum Efficiency

 

Mechanical Drawings

Download Mechanical Drawings

You can email OEM Technical Sales at: OEM.US@horiba.com or contact OEM at: +1.732.494.8660 Ext. 7733

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