HORIBA - Semiconductor

FPD Manufacturing Process

FPD Process

HORIBA have fostered various analysis, control, and evaluation technologies for the silicon semiconductor manufacturing processes; a field where strict specifications must be satisfied.

HORIBA makes full use of these technologies in the field of FPD processing. These technologies provide manufacturing support for various types of processes, including gas and liquid medication composition, the detection of particles on masks and thin film measurement. These technologies are also being applied to high-performance analytical and control equipment that supports the research and development of PDPs, organic EL, FEDs, and the diversifying and evolving field of FPDs.

Browse Products

GD-Profiler 2™
more GD-Profiler 2™

Discover a Whole New World of Information with Glow Discharge Optical Emission Spectrometer

LabRAM HR Evolution
more LabRAM HR Evolution

Confocal Raman Microscope

XGT-7200
more XGT-7200

X-ray Analytical Microscope

CS-600F
more CS-600F

Fiber Optic Type Chemical Concentration Monitor

CS-100F1 Series
more CS-100F1 Series

Fiber Optic Type Chemical Solution Concentration Monitor

CS-100 Series
more CS-100 Series

Stand-alone Type Chemical Concentration Monitor

CS-700
more CS-700

High Precision, High Stability Chemical Concentration Monitor

MICROPOLE System
more MICROPOLE System

Compact Process Gas Monitor

UVISEL 2 VUV
more UVISEL 2 VUV

A versatile spectroscopic ellipsometer covering a large range from VUV to NIR

Partica LA-960V2
more Partica LA-960V2

Laser Scattering Particle Size Distribution Analyzer

51 series
more 51 series

Explosion-proof Gas Analyzer

FS-3000
more FS-3000

Thermal Flow Splitter

Process
more Process

Process Analyzer System

SEC-E Series
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Mass Flow Controller

SEC-N100 Series
more SEC-N100 Series

Digital Mass Flow Controller

SEC-Z500X
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Multi Range/Multi Gas Digital Mass Flow Controller

SEC-Z700X Series
more SEC-Z700X Series

Pressure Insensitive Mass Flow Controller

VA-5000 / VA-5000WM Series
more VA-5000 / VA-5000WM Series

Multi-Component Gas Analyzer

LU Series
more LU Series

Liquid Auto Refill System

LSC series
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Compact Baking System

VC Series
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Direct Liquid Injection System

EV 2.0 Series
more EV 2.0 Series

Endpoint / Chamber Health Monitor based on Optical Emission Spectroscopy and MWL Interferometry

IR-400
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High-grade type Gas Monitor for Chamber Cleaning End Point Monitoring

IT-480 series
more IT-480 series

High-Accuracy Infrared Thermometers [Stationary type]

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