Process Control and In-situ Measurement for Photovoltaic Manufacturing Process
MV-2000 Series
Mixed Injection System Liquid Vaporizer
The MV-2000 Series achieves stable vaporization, even at low temperatures, using the new tornado flow method. This is suitable for vaporization a range of liquids even challenging sources such as "High-k", a liquid source which is pyrolyzed easily.
- Stable vaporization at low temperature using the new tornedo flow method
- Higher flow rate vaporization (add the stability data)
- Can vaporize a liquid source which is pyrolyzed easily
| Model | MV-2000 |
|---|---|
| Liquid Material | All liquids except those corrosive to stainless steel(ex. HCl, HF) |
| Setting Temperature | By vaporization conditions(Control Valve : Max 140 ˚C Vaporizer : Max 200 ˚C) |
| Leak Integrity | ≤ 1 × 10-8 Pa·m3 /s (He) |
| Internal leak standard | ≤ 1 × 10-6 Pa·m3 /s (He) |
| Wetted parts | SUS316L , PFA |
| Temperature Sensor | Thermocouple type K (CA) |
| Pressure Resistance | 1MPa (G) |
| Standard Fitting | Liquid inlet: 1/8 VCR type Male Carrier gas inlet: 1/4 VCR type Female Gas outlet: 1/2 VCR type Male |
| Operating Temperature | 15 - 50 ˚C |
| Option | Air valve(Internal leak standard: ≤ 1×10-9 Pa · m3 / s(He) ) |
- The generated flow rate may differ depending on the liquid material, amount of generation, generation conditions, etc. We will recommend the model most suited to your needs upon consultation.
- The vaporizer has a heater, temperature sensor, and switch inside of it. Please contact us for more details on their specifications.
External Dimension
Optical Fiber Manufacturing Process in Electrical Equipment
Liquid Source Vaporization and Supply in Research and Testing Laboratories
