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Fluid Control

HORIBA has a diverse range of products to cater for your fluid measurement and control requirements.

In a variety of manufacturing processes and research laboratories we offer precise measurement and reliable control of gas and liquids.  HORIBA is the recognised leader of high performance mass flow meters, mass flow controllers, automatic pressure controllers and liquid vaporization systems used throughout the cutting edge semiconductor manufacturing industry.

Mass Flow Control


Pressure Control


Liquid Source Vaporization System


Gas Generator Systems

MU Series

Browse Products


Pressure Insensitive Mass Flow Module

more DZ-100

Ultra-thin Mass Flow Controller

EC-5000 Series
more EC-5000 Series

Exhaust Pressure Controller

more FS-3000

Thermal Flow Splitter

GR-300 Series
more GR-300 Series

Wafer Back Side Cooling System

LE Series
more LE Series

Large Flow Liquid Source Vaporization Control System

LF-F/LV-F Series
more LF-F/LV-F Series

Digital Liquid Mass Flow Meters / Controllers

more MI-1000/MV-1000

Mixed Injection System Liquid Vaporizers

MV-2000 Series
more MV-2000 Series

Mixed Injection System Liquid Vaporizer

PV Series
more PV Series

Piezo Actuator Valve

SEC-400 Series
more SEC-400 Series

Mass Flow Controller

SEC-8000 F/D/E Series
more SEC-8000 F/D/E Series

High Temperature Digital Mass Flow Controller

SEC-E Series
more SEC-E Series

Mass Flow Controller

SEC-N100 Series
more SEC-N100 Series

Digital Mass Flow Controller

more SEC-Z500X

Multi Range/Multi Gas Digital Mass Flow Controller

SEC-Z700X Series
more SEC-Z700X Series

Pressure Insensitive Mass Flow Controller

UR-Z700 Series
more UR-Z700 Series

Digital Automatic Pressure Regulator

VC Series
more VC Series

Direct Liquid Injection System

XF-100 Series
more XF-100 Series

Digital Liquid Mass Flow Meters

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