HORIBA - Semiconductor

Gas Generator Systems

HORIBA gas generator systems are suitable for many applications. Due to the integration of HORIBA’s own mass flow controllers within our mixed gas generator systems we are able to offer high performance and accuracy.

HORIBA products are suitable for generating combustion gases supplied to burners and other industrial purposes, as well as laboratory uses in biotechnology, e.g. atmosphere gas supply systems inside fermenters, and the food and beverage markets.

HORIBA also have test gas generator systems for evaluating the performance of various kinds of gas sensors as well as systems for generating simulated gases for evaluating catalysts. The gas generator systems can be bespokely designed for individual customer needs.

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MU-2200
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Mixed Gas Generators MU Series

Vapor Concentration Control
Semiconductor Manufacturing Process
Vapor concentration control of precursors provide substantial improvement in stabilizing MOCVD processes. By measuring a precursor partial pressure in a downstream line with a Non Dispersive Infrared (NDIR) technology and controlling its total pressure, a precursor concentration can be kept constant. This precursor concentration control is validated as a practical method against a temperature fluctuation of a cylinder bath and a failure of reaching a saturation pressure in a cylinder.
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