Training course

Training

Ellipsometry: Advanced Modeling Techniques

Overview

  • Reference: ELL2
  • Dates:
    • June 8-10, 2020
    • November 23-25, 2020
  • Who should attend: Advanced users. A level of knowledge equivalent to Level ELL1 is required
  • Duration: 3 days (From 9:00 am to 5:30 pm)

Objectives

This training course targets advanced users, with a level of knowledge equivalent to ELL1. Attendees should have at least some ellipsometry experience and skill with DeltaPsi2 software.

  • Provides a good practice of modeling methods used for the characterization of complex structures such as: unknown materials, ultra thin films, anisotropic samples, limited backside reflection parameterization, etc. Customers are invited to bring samples.

     

Program

Day 1


Practical Session of Non-ideal Samples: Measurements and Modeling

  • Review of theory
  • Analysis of gradient layer
  • Analysis of thick films >2μm
  • Non-uniform thicknesses
  • Study of depolarizing sample

Day 2

Practical Session of Non-ideal Samples

  • Analysis of combined ellipsometric and transmission data for thin metallic films sample
  • Anisotropy: learn how to identify the axis orientation to run appropriate measurements for modeling  

 

Day 3

Practice session - Customer samples

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