Training course


Ellipsometry for Beginners


  • Reference: ELL1
  • Dates:
    • March 24-26, 2020
    • November 16-18, 2020
  • Who should attend: New users of HORIBA ellipsometers
  • Duration: 3 days (From 9 am to 5 pm)


  • Provides a thorough background in the basic ellipsometry theory and focus on modeling techniques with a large variety of hands-on sample analysis.
  • Use of the ellipsometer and DeltaPsi2 software through a large variety of hands-on sample analysis.



Day 1

Theory and Practical Session

  • Ellipsometry theory
  • Instrumentation
  • Overview of modeling process
  • Description of main functions of DeltaPsi2 software & hands on the ellipsometer
  • Procedure to check the system before to perform measurements
  • Measurement and modeling of transparent films on opaque substrates


Day 2

Practical Session & Software Use                                                                  

  • Sample analysis of semi–absorbing thin films in monolayers and multilayers of opaque substrate           
  • EMA, Roughness
  • Sample analysis of glass substrate
  • Sample analysis of semi-absorbing thin films on  glass
  • Sample analysis of absorbing films
  • Dispersion formulae parameterization
  • Sample analysis of thickness of non-uniform layers


Day 3

  • Practical Session: Customer Samples


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