HORIBA
  • Products
    • By Segment
      • Automotive
      • Medical
      • Process and Environmental
      • Semiconductor
      • Scientific
    • All Products (A-Z)
    • By Industry
      • Arts, Entertainment and Recreation
        • Art Conservation
        • Museums, Historical Sites and Similar Institutions
      • Education, R&D and Government Institutions
        • Universities
        • Research and Testing Laboratories
      • Energy and Environment
        • Battery
        • Coal and Consumable Fuels
        • Electric Utilities
        • Energy Fuel Oil
        • Environmental Countermeasures
        • Oil and Gas
        • Petroleum and Coal Products Manufacturing
      • Food and Beverage
        • Beverages
        • Food
        • Cosmetics
      • Health Care
        • Biotechnology
        • HORIBA In Vitro Diagnostic solutions for human health care
        • Life Sciences
        • Pharmaceuticals and Medicine Manufacturing
      • Industrials
        • Building Products
        • Commercial and Professional Services
        • Electrical Equipment
        • Machinery
      • Information Technology
        • Semiconductor Manufacturing Process
      • Materials
        • Chemicals
        • Chemical Manufacturing
        • Containers and Packaging
        • Nonferrous Metals
        • Nonmetallic Minerals
        • Paper, Forest Products and Manufacturing
        • Plastics and Rubber
        • Primary Metals
      • Mobility and Transportation
        • Automobiles and Components
        • Automotive Manufacturing
        • Other Transportation Equipment Manufacturing
      • Waste Management
        • Solid Waste Management and Remediation Services
        • Water Waste Management and Remediation Services
      • Water
        • Desalination
        • Drinking Water Utilities
        • High Purity Water
        • Other Industry Water
        • Water Reuse
    • By Technique
      • Atomic Spectroscopy
        • Energy Dispersive X-ray Fluorescence (ED-XRF)
        • Glow Discharge Optical Emission Spectrometry (GD-OES)
        • Inductively Coupled Plasma - Optical Emission Spectroscopy (ICP-OES)
        • Inorganic Elemental Analysis
        • Beta-ray Absorption Analyzer
      • Electrochemistry
        • Potentiometry based on Ion-Selective Electrode (ISE)
      • Life Science Techniques
        • Label-free Detection / Surface Plasmon Resonance Imaging (SPRi)
      • Mass Spectrometry
        • Plasma Profiling Time-Of-Flight Mass Spectrometry (PP-TOFMS)
        • Quadrupole Mass Spectrometry
      • Material Characterization
        • Colorimetry
        • Condensation Particle Counter (CPC)
        • Dynamic Light Scattering (DLS) Particle Size Distribution Analysis
        • Magneto-pneumatic Analysis
        • Mechanical Flowmetry
        • Pressure-based Mass Flowmetry
        • Spectroscopic Ellipsometry
        • Static Light Scattering (SLS) / Laser Diffraction Particle Size Distribution Analysis
        • Fluid Measurement and Control
      • Molecular Spectroscopy
        • Absorption and Transmission Spectroscopy (UV, Visible, NIR)
        • Cathodoluminescence (CL, CLUE)
        • Chemiluminescence
        • Fluorescence Spectroscopy
        • Fourier-Transform Infrared Spectroscopy (FTIR)
        • Non-Dispersive Infrared Spectroscopy (NDIR)
        • Non-Dispersive Ultra Violet Spectroscopy (NDUV)
        • Photoluminescence (PL) & Electroluminescence (EL)
        • Quantum Cascade Laser (QCL) Spectroscopy
        • Raman Imaging and Spectroscopy
        • Vacuum Ultra Violet Spectroscopy
      • Radioactivity
        • Crystal Scintillation
      • Surface Science Techniques
        • Plasma Profiling Time-Of-Flight Mass Spectrometry (PP-TOFMS)
        • AFM-Raman (co-localized measurements & TERS)
  • Applications
    • Arts, Entertainment and Recreation
      • Art Conservation
      • Museums, Historical Sites and Similar Institutions
    • Education, R&D and Government Institutions
      • Universities
      • Research and Testing Laboratories
    • Energy and Environment
      • Coal and Consumable Fuels
      • Electric Utilities
      • Energy Fuel Oil
        • Wear metals and additive Elements Analysis.
      • Environmental Countermeasures
      • Petroleum and Coal Products Manufacturing
        • Petrochemicals
      • Photovoltaics
      • Oil and Gas
      • RoHS and ELV
    • Food and Beverage
      • Agriculture & Crop Science
      • Research & Development
      • Beverages
      • Food
      • Food & Beverage Manufacturing
    • Health Care
      • Biochemistry
      • Biotechnology
        • High Throughput Screening of Affimer Proteins using SPRi Label-Free Technology
        • Analytical Chemistry
      • Human Health Care
      • Life Sciences
        • Cell Biology
        • Blood Testing
        • Proteomics
        • Microbiology
        • Structural Biology
        • Genomics
        • Bioengineering
        • Nanoscience
        • Personal Care
      • Pharmaceuticals and Medicine Manufacturing
        • Cosmetics
        • Drug Discovery and Development
        • Drug Delivery
        • Counterfeit
        • Quality Assurance
        • Vacuum Monitoring in Dryer Equipment for Freeze Dry in Pharmaceuticals and Medicine Manufacturing
        • Bioprocessing
        • Analytical Chemistry
    • Industrials
      • Battery
      • Commercial and Professional Services
        • Gas mass flow control and measurement for reference value of PM2.5 measurement
      • Construction & Engineering
      • Electrical Equipment
      • Machinery
    • Information Technology
      • Semiconductors
        • 2D Materials
        • Graphene
        • Photovoltaics
        • Determination of Perovskite Optical Constants
        • Display Technologies
        • Data Storage
        • Nanomaterials
      • Semiconductor Manufacturing Process
      • Technology Hardware and Equipment
    • Materials
      • Ceramics
      • Chemicals
        • Fertilizers, phyo-sanitary
        • Polymers & Plastics
        • Analytical Chemistry
      • Chemical Manufacturing
      • Construction Materials
      • Containers and Packaging
        • Quality control in the aluminium packaging industry
      • Metal Powder
      • Nonferrous Metals
      • Nonmetallic Minerals
        • Glass
        • Coatings
      • Paper, Forest Products and Manufacturing
      • Plastics and Rubber
      • Primary Metals
      • Material Research
        • Corrosion
        • 2D Materials
        • Quantum Dots
        • Carbon based Materials - Graphene
        • Nanomaterials
      • Photovoltaics
      • Forensics
      • Metal and Mining
        • Gemstones
    • Mobility and Transportation
      • Automotive Manufacturing
      • Engine, Turbine and Power Transmission Equipment Manufacturing
      • Real Driving Emissions
      • RDE Plus
    • Waste Management
      • Solid Waste Management and Remediation Services
      • Water Waste Management and Remediation Services
        • Repeatability of Traces and Major Elements in Water
        • Very Rapid Analysis of Supply Water, Sludge From Purification Station and Animal Food
        • Waste Water and Soil Analysis
        • Waste Water Treatment and Disposal
    • Water
      • Drinking Water Utilities
      • Water Reuse
        • Water Testing
      • General Water Measurement
  • Technology
    • Measurement and Control Techniques
      • Electrochemistry
        • The Story of pH
        • The Basis of pH
        • Measurement of pH
        • The Story of Ion
        • The Basis of Ion
        • Measurement of Ion
        • The Story of ORP
        • The Basis of ORP
        • Measurement of ORP
        • The Story of Conductivity
        • The Basis of Conductivity
        • Measurement of Conductivity
        • The Story of Salt
        • The Story of Dissolved Oxygen
        • The Basis of DO Measurement
        • LAQUA Electrode Technology
      • Elemental Analysis
        • X-ray Fluorescence Spectroscopy (XRF)
        • Glow Discharge Optical Emission Spectroscopy
        • Inductively Coupled Plasma - Optical Emission Spectroscopy (ICP-OES)
        • Carbon/Sulfur & Oxygen/Nitrogen/Hydrogen Analysis
      • Health Care
        • Multi Distribution Sampling System (MDSS)
        • Reticulocytes Analysis
        • CBC + CRP
        • Slide Production
        • Automatic Rerun
        • Absorbance
        • Fluorescence
        • Flow cytometry
        • Impedance / Resistivity
        • Sedimentation
        • Spectrophotometry
        • Potentiometry
        • INR screening
        • Clotting
        • Turbidimetric
        • Chromogenic
      • Light Scattering
        • Dynamic Light Scattering (DLS) Particle Size Distribution Analysis
        • Molecular Weight
        • Raman Scattering
        • Static Light Scattering (SLS) / Laser Diffraction Particle Size Distribution Analysis
        • Zeta Potential
      • Fluid Control
        • Thermal Mass Flowmetry
      • Mass Spectrometry
        • Quadrupole Mass Spectrometry
      • Microscopy and Imaging
        • AFM-Raman
        • Atomic Force Microscopy [AFM]
        • Cathodoluminescence
        • Image Analysis of Particles
        • Micro-X-ray Fluorescence
      • Physisorption
        • Surface Area
      • Spectroscopy
        • Cathodoluminescence Spectroscopy
        • AFM-Raman
        • Detectors
        • 50 years of Diffraction Gratings
        • Diffraction Gratings Ruled and Holographic
        • Fluorescence Spectroscopy
        • Raman Spectroscopy
        • Spectrometers, Monochromators and Spectrographs
        • Spectroscopic Ellipsometry
        • Vacuum Ultra Violet Spectroscopy
        • X-ray Fluorescence
      • Surface Plasmon Resonance
        • Surface Plasmon Resonance Imaging (SPRi)
  • Service
    • Analysis Services
      • Analysis Centers and Services
      • EMC Analysis Service
    • Calibration and Certification
      • Calibration Centers
    • Customer Support
      • HORIBA Medical Documentation Database
      • Medical Customer Support
      • On-Site Support
      • Software Upgrades
      • STARS Helpdesk
    • Maintenance
      • Dynamometer and Other Overhaul Services
      • Periodic Maintenance
    • Spare Parts and Consumables
    • Testing and Consulting
      • Testing Centers
    • Training
      • Product Training
        • Scientific Product Training
        • Automotive Product Training
        • Medical Product Training
      • Technology Training
        • Raman Training
        • Glow Discharge Training
        • Fluorescence Training
        • Ellipsometry Training
        • SPRi Training
        • Inductively Coupled Plasma Training
        • Inductively Coupled Plasma Training (USA)
        • PSA Training
        • Carbon, Sulfur, Oxygen, Nitrogen and Hydrogen Analyzers Training (USA)
        • Online-OnSite Training
  • Company
    • About HORIBA
      • Message
      • Company Profile
        • Board of Directors
        • Corporate Officers
      • Culture
        • Corporate Philosophy
      • History
        • 1945–1960s
        • 1970s
        • 1980s
        • 1990s
        • 2000s
        • 2010s
      • Technical Journal "Readout"
        • Masao Horiba Awards Research Articles
        • Readout No. E54 - Microplastics and Nanoplastics: Analysis and Method Development
        • Readout No. E53 - 2019 Masao Horiba Awards - Advanced Analytical and Measurement Technologies for Efficient Control System to Maximize the Performance of Electric Power and Batteries Usage
        • Readout No. E52 - Green Innovation for Marine Shipping Industry
        • Readout No. E51 - 2018 Masao Horiba Awards Advanced analytical and measurement technologies in semiconductor manufacturing processes
        • Readout No. E50 - Low-Carbon Society and Environmental Improvement
        • Readout No. E49 - Photonic Instrumentation in Life Science
        • Readout No. E48 - Water Measurement Experts
        • Readout No. E47 - Application for Semiconductor Manufacturing Process
        • Readout No. E46 - New Development for Automotive Test Systems
        • Readout No. E45 - Application Technology in Analysis
        • Readout No. E44 - Contribution of Diagnostics to Total Medical Care/Healthcare
        • Readout No. E43 - Watching the Environmental and Society with Measurements
        • Readout No. E42 - More Efficient Testing on Automotive Development, Improving the Accuracy of Fuel Consumption Measurement
        • Readout No. E41 - Application
        • Readout No. E40 - Application
        • Readout No. E18 - EUROPE
        • Readout No. E17 - AMERICA
        • Readout No. E16 - Chinese (Asia)
        • Readout No. E15 - Technologies for HORIBA STEC
        • Readout No. E14 - Masao HORIBA Awards"Measurement of Bioparticles" and "Measurement of Internal Combustion"
        • Readout No. E13 - Technologies for Automotive Testing
        • Readout No. E12 - Masao Horiba Awards "X-ray Analysis Technology"
        • Readout No. E11 - The Second Masao Horiba Awards
        • Readout No. E10 - Environmental Analysis Technologies for the Management of Global Environment and the Development of Industry
        • Readout No. E09 - The First Dr.Masao Horiba's Award and the 50th Anniversary Products
        • Readout No. E08 - Products and Technologies of HORIBA ABX
        • Readout No. E07 - Products and Technologies of Jobin Yvon HORIBA Group
        • Readout No. E06 - 50th Anniversary of HORIBA, Ltd. Products and Technology of HORIBA Group
        • Readout No. E05 - Semiconductor Instruments
        • Readout No. E04 - Hematology Instruments
        • Readout No. E03 - Paticulate Matter
        • Readout No. E02 - The Technolgy Alliance for X-ray Analysis
        • Readout No. E01 - the Analysis of the Global Environment
      • Virtual Patent Marking
    • Events
    • Career
    • Investor Relations
      • Home
      • Investor Relations News
      • Management Policies
        • Message from the CEO
        • Mid-Long Term Management Plan
        • Corporate Governance
        • Corporate Culture "Joy and Fun"
        • Corporate Philosophy
      • IR Library
        • Financial Statements
        • Presentation Materials
        • HORIBA Report
        • Financial Information
      • Stock Information
        • Basic Stock Information
      • Investor Relations Contact
      • Other IR Information
        • Investor Relations Calendar
        • Disclaimer
    • News
    • Social Responsibility
      • Home
      • Message
      • HORIBA's CSR
        • CSR Policy, CSR Promotion System
        • UN Global Compact
        • HORIBA and the SDGs
      • Environment
        • Policy
        • Environmental Activities
        • Eco-Friendly Products
        • Actions for RoHS Directive, REACH Regulation and GHS Regulations
      • Social
        • Home
        • Integrated Management System
        • Quality
        • Occupational safety and health
        • Promotion of Diversity
        • Material Procurement
        • Social Activities
      • Governance
        • Corporate Governance
        • Code of Ethics
        • Internal Controls
        • Compliance Promotion Systems
        • Risk Management
      • HORIBA Special Contents
      • Library
      • HORIBA Group Social Media
        • Social Media Registered Accounts
        • HORIBA Group Social Media Policy
        • HORIBA Group Terms of Use for Social Media
      • Integrated Report
    • Group Companies
      • Americas
        • Brazil
        • Canada
        • United States
      • Asia
        • China
        • India
        • Indonesia
        • Japan
        • Korea
        • Philippines
        • Singapore
        • Taiwan
        • Thailand
        • Vietnam
      • Europe
        • Austria
        • Belgium
        • Czech Republic
        • France
        • Germany
        • Italy
        • Netherlands
        • Poland
        • Portugal
        • Romania
        • Russia
        • Spain
        • Sweden
        • Turkey
        • United Kingdom
  • Contact
    • Contact Form
    • Worldwide Locations
Glow Discharge Optical Emission Spectroscopy (GD-OES) open open
  • Basic Concepts
  • Sample Measurement with GDOES
  • Sample Test and Analysis
  • Comparison with Other Techniques: Surface Analysis
  • Comparison with Other Techniques: Bulk Analysis
  • Instrument Introduction
  • Benefits and Features of Pulsed RF GDOES
  • Join the GD Community
  • Bibliography
  • HORIBA
    • Products
    • Applications
    • Technology
    • Service
    • Company
    • Contact
    Technology
    • Measurement and Control Techniques
    Measurement and Control Techniques
    • Basic Concepts
    • Sample Measurement with GDOES
    • Sample Test and Analysis
    • Comparison with Other Techniques: Surface Analysis
    • Comparison with Other Techniques: Bulk Analysis
    • Instrument Introduction
    • Benefits and Features of Pulsed RF GDOES
    • Join the GD Community
    • Bibliography
    Basic Concepts

Basic Concepts

What is GDOES?

Quantitative Depth Profile analysis of a CIGS thin film solar cell.

Fig 1: Quantitative Depth Profile analysis of a CIGS thin film solar cell.

As the acronym suggests, GDOES combines a glow discharge (GD) with an optical emission spectrometer (OES). This is an analytical technique that provides both the surface/depth profile and the bulk elemental composition of solid materials and layers quickly, and with high sensitivity to all elements.

Qualitative Depth Profile analysis of a PVD multilayered coating –about 10 μm thick on steel.

Fig 2: Qualitative Depth Profile analysis of a PVD multilayered coating –about 10 μm thick on steel.

This is an analytical technique that provides both the surface/depth profile and the bulk elemental composition of solid materials and layers quickly,  and with high sensitivity to all elements.

3D view of a GD crater (diameter 4 mm).

Fig 3: 3D view of a GD crater (diameter 4 mm).

Operation involves the controlled sputtering of a representative area of the sample to be analyzed by the GD plasma and the simultaneous OES observation of the sputtered species. The GD technique is destructive. A crater is made in the sample after analysis.

The technique is extremely fast and depth resolution can be excellent (nm level) if sample is flat over the sputtered area.

What is the history of GDOES?

“Glow Discharges” are low pressure type plasma sources found in many domains, from TV plasma displays to light sources.

Most coatings used in the microelectronics industry are deposited using these plasmas. Plasmas are also applied for decontamination of surfaces. Adjustment of trajectories of satellites is done through thrusters powered by plasmas.

Surprisingly, our GDOES comes from a very different background, namely the domain of analytical chemistry in the metal industry. When W. Grimm proposed the first GD source in 1968, his idea was to connect it to an Optical Emission Spectrometer (OES) and to have a superior light source, compared to his standard spark one, for elemental bulk analysis of Cu alloys.

Soon a group of researchers working with R. Berneron at IRSID in France realized the potential of this new combination for the exploration of galvanized steel plates and on passive films on steel  howing elemental depth profile analysis of thick and thin films by GDOES. For many years, the technique developed mainly in the steel industry, though the first published depth profiles with GDOES (1970) were of GaAs thin films.

What is Pulsed RF GDOES

By Pulsed RF GDOES, we mean the most recent and comprehensive GD instrument. In this instrument, the GD plasma is still combined with high resolution optics but the powering of the plasma is done by Pulsed RF.

With pulsed RF GDOES not only has the range of applications of GD been drastically increased but also the task for obtaining quantitative depth profiles has been simplified. As an example a single calibration can be done using a multilayered material containing both conductive and isolating layers.

What is the information provided by Pulsed RF GDOES?

Typical Pulsed RF GDOES result.

Fig 4: Typical Pulsed RF GDOES result: composition as a function of the depth. Sample is an electronic component made of brass coated with NiP and featuring a gold top coat layer. A 4 mm crater has been eroded by the GD process. Total analysis time: 2 minutes.

Pulsed RF GDOES provides fast elemental chemical analysis of solid materials as a function of depth.

All elements can be measured, including C, H, N, Cl, O, Na, Li, etc.

Pulsed RF GDOES does not measure isotopes except possibly Deuterium (D, isotope of H). Pulsed RF GDOES does not measure molecules (as RAMAN does) though some “molecular bands” can sometimes be seen in the plasma and provide indirect information on the material studied.

Pulsed RF GDOES relies on the controlled erosion of a representative part of the material (few mm crater diameter) by the plasma and gives the elemental distribution as a function of the penetration depth.

Multi spots on a large wafer sample.

Fig 5: Multi spots on a large wafer sample.

Pulsed RF GDOES will answer in minutes multiple questions such as:

  • Which elements are present in the sample?
  • What are the concentration levels?
  • Is the sample homogeneous in depth?
  • Were any coatings or surface treatments applied to the sample?
  • How thick are the coatings?
  • Is there any contamination at an interface?
  • Is there any oxidation of the sample?
  • Is there any diffusion in the layers?
Overlay of 5 measurements on an anodized Al with Cr delta layer.

Fig 6: Overlay of 5 measurements on an anodized Al with Cr delta layer.

    The speed of analysis allows performance of multiple measurements on different locations of a sample to assess repeatability.

    What problems can be solved by pulsed RF GDOES?

    Pulsed RF GD is the most advanced and versatile analysis method that allows all types of materials made of thin and thick films (conductive and isolating) to be measured.

    Whether you compound materials or control a production, Pulsed RF GDOES is a fast, reliable and sensitive tool to obtain elemental depth profiling and gives you results in minutes that will let you:

    • See if expected elements are present in each layer and at interfaces, and detect unexpected ones
    • Assess if the concentration levels are correct or not
    • Check the repeatability of a depth distribution and be informed of possible deviations
    • Quickly optimize a process and assure that it remains under control
    • Identify what the competitors are doing
    • Track sources of corrosion
    • And more!

    Is Pulsed RF GDOES a destructive analysis method or a non-destructive one?

    GDOES crater.

    Fig 7: GDOES crater.

    Pulsed RF GDOES is a destructive analysis method. The result of the sputtering of the material is a usually circular and flat hole having the diameter of the anode. We call this hole the crater.

    • Products
      • By Products (A-Z)
      • Automotive
      • Medical
      • Process and Environment
      • Scientific
      • Semiconductor
    • Applications
      • Drinking Water Utilities
      • Automotive Manufacturing
      • Semiconductor Manufacturing Process
      • Research and Testing Laboratories
    • Technology
      • Glow Discharge Spectroscopy
      • Pressure-based Flowmetry
      • Quadrupole Mass Spectrometry
      • Raman Spectroscopy
    • Service
      • On-Site Support
      • Spare Parts and Consumables
    • Company
      • News
      • Events
      • Career
      • History
      • Corporate Culture
    • Contact
      • Contact Form
      • Worldwide Locations

    Terms and Conditions Privacy Notice Cookies Imprint