Panel-mount Type Resistivity Meter(Four-Wire Transmission, 2-channel)

HE-960RW connects resistivity sensor(ERF sereies) and measures resistivity and temperature in the sample water.
This resistivity meter is ideal for such applications as the high-precision water monitoring employed at ultra-pure water plants used in semiconductor manufacturing.
They utilize newly designed, high-precision, high-stability temperature measurement circuitry and a vastly improved temperature compensation function, an important element for measuring the resistivity of ultra-pure water.


Measuring range

Resistivity: 0 - 100.0 MΩ・cm, 0 - 1000 kΩ・m
Temperature: 0 - 100 ℃

Division: Process Water
Manufacturing Company: HORIBA Advanced Techno Co., Ltd.


  • Highly precise, highly stable temperature compensation function
    Control fluctuations in measured values in the region of 18 MΩ·cm resistivity to within a minimum 0.02 MΩ·cm over a water temperature range of 15 °C to 35 °C.
  • 50 m extension possible for sensor cables
  • 2-channel simultaneous measurement
  • Independent 4 contact alarms
  • Abundant in-house calibration equipment
    •HORIBA Advanced Techno resistivity meters are only shipped after cellconstant inspection is performed on the resistivity sensors and inspectionfor temperature sensor instrumental errors is implemented using calibration equipment that has been adjusted with high-traceability reference equipment.
    •The sensors can also be combined with a converter for integrated calibration in advance of shipping.
  • Communication device ability (RS-485)
  • Utilization of lead-free solder



Product nameIndustrial 2-channel specific resistance meter
Electrode type (2-electrode method)
Sensor input2 channels (for concurrent measurement with sensors isolated each other)
Cell constant0.01/cm
Temperature sensor
Platinum resistance 1000 Ω/0℃
Measuring rangeMeasurement unitkΩ•m0 to 20.00 to 200.00 to 1000 *
MΩ•cm0 to 2.000 to 20.000 to 100.0 *
*: Measurable without temperature compensation
0℃ to 100℃
(The number of digits after the decimal point is selectable from one and two. The range of measurements is −20℃ to 120℃.)
Desalination rate0% to 100%
Temperature: 0℃ to 100℃ (Select your desired decimal point from 0, 1, and 2 digits.)
RepeatabilityWithin ±0.1% of the full scale (in equivalent input)
LinearityWithin ±0.5% of the full scale (in equivalent input)
Number of outputs: 2
4 mA to 20 mA DC/0 mA to 20 mA DC, input/output isolated type
Maximum load resistance: 900 Ω
Transmission output range: Freely selectable within the measurement range
(Negative terminals of each transmission output channel are connected inside and thus have the same electric potential.)
Contact outputNumber of outputs: 4
Alarm contact outputs (R1, R2, and R3)
  Contact type: relay contact, SPST (1a)
  Contact rating: 240 V AC, 3 A and 30 V DC, 3 A (resistance load)
  Contact function: selectable from the upper/lower limit action (ON/OFF control), delay, and hysteresis
  Selectable from the selected measurement, anomaly alarm, and maintenance.
Alarm contact output (R4)
  Contact type: relay contact, SPDT (1c)
  Contact rating: 240 V AC, 3 A and 30 V DC, 3 A (resistance load)
  Contact function: selectable from the upper/lower limit action (ON/OFF control), delay, and hysteresis
  Selectable from the selected measurement, anomaly alarm, and maintenance.
  (However, R1 and R2, and R3 and R4 share the common contacts respectively.)
Calibration functionSpecific resistance: Based on the specified compensation coefficient for cell constant (parameter input)
Temperature: Calibrated by comparing with the reference thermometer
RS-485 input/output
output hold feature
  • Previous value hold
  • Optional value hold
    Selectable from the above (However, only the previous value hold is available in the maintenance mode.)
  • Sensor diagnosis
    Short-circuit and disconnection of the temperature sensor
  • Out of the measurement range
  • Converter error
  • Temperature compensation for extra-deionized water and impurities
      Select the temperature characteristics of impurities
      - NaCl temperature characteristics
      - Arbitrary temperature coefficient entry (temperature coefficient: 5%/℃)
      Reference temperature: 5℃ to 95℃
  • No temperature compensation is performed.
0℃ to 100℃
Extra deionized
water specific
resistance selection
kΩ•m182.3 (standard), 181.8, 182.4Select from options shown on the left.
MΩ•cm18.23 (standard), 18.18, 18.24
Clipping functionWhen the measured value is above the upper limit of the measurement range derived from the specified specific resistance, the specified resistance is used as the measured value.
−5℃ to 45℃
Relative humidity20% to 85% (without dew condensation)
−25℃ to 65℃
Power supplyRated voltage 100 V to 240 V AC, 50/60 Hz, 10 VA (max.)
StructureIndoor-use panel installation type
Panel case: ABS, Terminal: PBT
Panel: IP65 dust and water proof structure
Protective structurePanel: IP65 (IEC60529, JIS C0920)
Rear case: IP20, Terminal:IP00
Class II device (IEC61010-1)
Pollution level 2 (IEC61010-1)
CE MarkingEMC Directives: EN61326-2-3
Low Voltage Directive: EN61010-1
RoHS Directive: EN50581
FCC RuleFCC Part15
96 (W) mm × 96 (H) mm × 115 (D) mm
Case depth: approx. 105 mm (when panel-mounted)
MassApprox. 550 g
Compatible sensorsERD/ERF-series specific resistance sensor, cell constant 0.01/cm

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