Low Concentration Monitor- Sulfuric Acid/Hydrogen Peroxide HF-700

The HF-700 stabilizes hydrofluoric concentrations on the order of ppm in diluted sulfuric acid and hydrogen peroxide to enable continuous measurement and allow effective process management of the removal of the polymer residue following the etching process.

 

Segment: Semiconductor
Manufacturing Company: HORIBA Advanced Techno Co., Ltd.

 

  • Stable and continuous measurement
  • Multiple measurement modes to fit the application
    The standard mode / A reagent-saving mode / A continuous measurement mode / An intermittent measurement mode
  • Easy-to-do calibration (by sending signal)
  • Easy electrode replacement

 

 

Model nameHF-700
Measurement methodFluoride ion electrode method
Measurement range0 - 1000mg/L (0 - 100/200/500/1000mg/L)
RepeatabilityWithin +/- 2% of the full scale
StabilityWithin +/- 2% of the full scale/10 min.

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