CS Series

The concentration monitoring of chemical solutions play an advanced role as a vital part of the "Monitor → Feedback → Control" process control in accordance to the evolution of semiconductor processes. HORIBA has a wide product lineup of chemical concentration monitors specialized for chemical concentration management from FEOL to BEOL in order to fulfil the clients’ needs.


CS-900
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Non-Contact Chemical Concentration Monitor

CS-620F
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Optical Fiber Type Hot Phosphoric Acid Concentration Monitor

CS-700
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High Precision, High Stability Chemical Concentration Monitor

CS-600F
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Fiber Optic Type Chemical Concentration Monitor

CS-100 Series
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Stand-alone Type Chemical Concentration Monitor

CS-100F1 Series
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Fiber Optic Type Chemical Solution Concentration Monitor