Real time interferometric endpoint for depth targeting.

Liquid Auto Refill System LU Series

Automatic liquid refill system delivers chemicals directly to baking or direct liquid injection systems. Safe, efficient, and continuous supply of liquid sources.

Low Concentration HF/HCl/NH3 Monitor HF-960M

High precision, high-speed measurement of low concentrations of HF, HCl, and NH3. Resistance sensor.

SEC-400MK3/500MK3

Low cost model of SEC-400 series

SEC-E40/50MK3

Low cost model of SEC-E series

PR-PD5 Particle detection system

For use in combination with Manufacturing Devices. Low-cost reticle/mask particle inspection with enhanced versatility and compactness.

MFT20 mass flow controller tester image

The MFT-20 mass flow checker is a useful tool for equipment engineers to prove a fault with a mass flow controller before removing it.

Mass Flow Controller SEC-E Series

The reliable thermal sensor mass flow controller installed solenoid valve for a wide variety of industry. Wide control range from 10 SCCM to 200 SLM.

Mass Flow Controller SEC-400 Series

The economy mass flow controller installed with thermal valve.