SEF-E series mass flow controllers

Low cost solenoid valve mfc's are suitable for flow control from 0.2sccm to 500slm N2 equivalent.

SEF-400

A basic mass flow meter

Mixed Injection System MV-2000

High stability, compact mixed injection vaporizer system using the new vaporization method, "tornado flow". Suitable for vaporizing liquid sources pyrolyzed easily.

Mixed Injection System Liquid Vaporizer MI-1000/MV-1000 Series

Vaporize liquid source stably by the gas-liquid mixture vaporization method. Can be used for low temperature and large flow production.

Multi Range/Multi Gas Digital Mass Flow Controller SEC-Z500X Series

The best-selling digital mass flow controller offering multi range/multi gas solutions. High accuracy, fast response, and compact size. All metal.

Endpoint controller for plasma etch cluster tools: Simultaneous Real Time Multi-Chamber - Multi diagnosis monitor

OpenPlex

Designed to meet the demands of biologists and research scientists alike, the OpenPlex is a compact surface plasmon imaging system with an accessible platform.

Piezo Actuator Valve PV Series

The fast response piezo actuator valves are equipped with metal diaphragms and metal O-rings.

PR-PD2HR Particle detection system

Achieves dramatic cost reductions in advanced mask inspections

HORIBA's PR-PD2 Particle Detection System

High sensitive particle detection down to 0.35µm.