GAS FLOW MEASUREMENT / CONTROL
As semiconductor devices get faster and levels of integration increase, higher precision is required in device construction, and new materials are being introduced into the wafer production process to increase production efficiency.
HORIBASTEC is the recognized leader in mass flow technology, performing extensive research and development bringing the world’s first digital mfc, compact mfc, and more recently, wide range and pressure insensitive mfcs to market. High temperature mfcs are also available that can operate up to 120˚C. Mass flow controllers can control flows up to 200slm with different interfaces including analog, RS 422A, RS-485, DeviceNet.
The best-selling digital mass flow controller offering multi range/multi gas solutions. High accuracy, fast response, and compact size. All metal.
The leading-edge, high performance pressure insensitive mass flow module installed with the differential pressure detection and the piezo actuator valve. Multi range/gas/pressure solution and G-LIFE Self-Diagnosis function.
The reliable thermal sensor mass flow controller installed solenoid valve for a wide variety of industry. Wide control range from 10 SCCM to 200 SLM.
