
LIQUID AND VAPOR DELIVERY
As semiconductor devices get faster and levels of integration increase, higher precision is required in device construction, and there are now a larger variety of liquid sources used in the semiconductor, FPD and PV manufacturing processes.
HORIBASTEC is the clear world leader in this area offering a full line up liquid flow control and liquid source vaporization and control systems. Different vaporizing methodologies are available for the different precursors , these include baking, direct injection and mixing to guarantee efficient and stable delivery of vapor to the point of use. Auto refill systems complete the line-up offering uninterrupted, safe and reliable delivery of liquid precursors increasing uptime and reducing operator handling and risk of process contamination.
High precision liquid mass flow controller using the sensor with a unique cooling method. Can control from micro-liter to ultra low flow rate.
Vaporize liquid source stably by the gas-liquid mixture vaporization method. Can be used for low temperature and large flow production.
The compact vaporization system does not require carrier gas, it can be used with either a liquid or gas flow meter, allowing for easy integration for direct liquid injection.
Best-selling, compact baking system suitable for a range of liquid source delivery applications. Easy maintenance.
Automatic liquid refill system delivers chemicals directly to baking or direct liquid injection systems. Safe, efficient, and continuous supply of liquid sources.