HORIBASTEC has taken its world leading mass flow technology and developed a range of products to control pressure. Precision automatic pressure controllers can control pressure upstream or downstream of the regulator. Chamber pressures can be controlled by an exhaust pressure controller that features a high–resolution stepping motor and unique butterfly valve. For Back-side wafer cooling HORIBASTEC have He pressure controllers with integrated mass flow sensors. HORIBASTEC also offer a range of piezo electric all-metal sealed valves.

Wafer Back Side Cooling System GR-300 Series

High stability and accuracy pressure controller for back side wafer cooling in semiconductor manufacturing, installed piezo actuator valve and pressure sensor.

Automatic pressure regulators

The UR series automatic pressure regulators are electronic regulators with high-precision pressure sensors and ...

Exhaust Pressure Controller EC-5000 Series

The exhaust pressure controller maintains pressure within a chamber at any desired level. Equipped the high-resolution stepper motor and butterfly valve.

Piezo Actuator Valve PV Series

The fast response piezo actuator valves are equipped with metal diaphragms and metal O-rings.