Industry
Bubbling System
Digital Mass Flow Meter/Controller
For various industries. Wide range of communication, Digital/Analog, DeviceNet™, CC-Link®, PROFIBUS™ and EtherCAT®. Wide control range from 10 SCCM to 1000 SLM. All-metal.
The best-selling digital mass flow controller offering multi range/multi gas solutions. High accuracy, fast response, and compact size. All metal.
Gas Concentration Monitor
In-line compact vapor concentration monitor, enables MOCVD precursor delivery to be stable.
Monitors SiF4 gas concentration in real time, and identifies the cleaning end-point based on SiF4 gas concentrations.
Digital Automatic Ppressure Regulator
High performance auto pressure regulator with installed pressure sensor and piezo actuator valve. Digital/Analog and DeviceNet™ communications.