Inspection Principle

The system detects particles by analyzing the scattering of laser light when the laser hits them. Evaluation of the scattered light enables detection of the size and location of the particles. The surface undergoing inspection is scanned by laser beams via spinning galvanometer mirrors and detectors measure the amount of light coming off the surface. An exclusive low-pass filter developed by HORIBA is used to analyze signal data for light reflected from the patterned surface and light scattered by particle contaminants. This improves discrimination. Argon lasers (488 nm) are used to increase operation reliability even further.

PD series detection principle

Reduce inspection errors using unique Signal Processing Method

HORIBA's exclusive signal processing is able to suppress false detection down to the 1.0 µm / 1.0 µm L and S level. Pseudo-detection is further minimized through the use of a low-pass filter, which enhances pattern discrimination. This is very effective in reducing false detection on dense patterns.

PD Series Detection

May also be used for regular inspection after pellicle attachment

A function that measures pellicle transmissivity enables particle detection scanning to be carried out at the proper sensitivity. By switching the light paths, measurement can be done free of the influence of shadows from within the pellicle.

*Please note some parameters may vary depending on the model and specification.