
Plasma Profiling TOFMS
Thermoelectric materials
Sb2Te3, Bi2Te3
- K.-G. Reinsberg, C. Schumacher, A. Tempez, K. Nielsch, J.A.C. Broekaert, Depth-profile analysis of thermoelectric layers on Si wafers by pulsed r.f. glow discharge time-of-flight mass spectrometry Spectrochimica Acta Part B: Atomic Spectroscopy, 2012, 76, 175-180. DOI 10.1016/j.sab.2012.06.005