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Sommaire » Semiconductor Products Measuring Object

Measuring Object

Chemical Solution

  • SC-1
  • SC-2
  • BHF
  • SPM
  • FPM
  • HF/HNO3
  • TMAH/H2O2
  • Components of various chemicals
  • pH
  • TMAH
  • HF
  • HF/HCl
  • HF/HCl/NH3
  • Resistivity
  • Conductivity

Ultra Pure Water

  • Silica
  • Resistivity

Reticle/Particle

  • Reticle/Mask Particle

Components of Various Gases

  • Various kinds of process gases

Thin Film

  • Film thickness

Thin Film Process

  • Etching end-point
  • Residual gas

Gas/Liquid Flow Rate

  • Gas flow rate
  • Liquid source flow rate

Liquid Source Vaporization Flow Rate

  • Liquid source vaporization flow rate

Gas Pressure

  • Gas pressure
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